In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire  

作　　者：SHANGGUAN ShiYong ZHANG JianGuo LI ZhanZhu SHI Wei WANG WenKe QI DongFeng ZHENG HongYu 

机构地区：[1]Center for Advanced Laser Manufacturing(CALM),Shandong University of Technology,Zibo 255000,China

出　　处：《Science China(Technological Sciences)》2024年第1期73-82,共10页中国科学（技术科学英文版）

基　　金：This work was supported by the National Key R&D Program of China(Grant Nos.2022YFB4600402 and 2022YFE0199100);the Natural Science Foundation of Shandong(Grant Nos.ZR2022MF030 and ZR2020ME164);the Natural Science Foundation of Zhejiang(Grant No.LY21F050002).

摘　　要：Laser-induced breakdown spectroscopy(LIBS)is widely used for elemental analysis.However,its application for monitoring and analyzing a laser machining process by examining the changes in spectral information warrants further investigation.In this study,we investigate the effect of laser parameters on the spectra,variations in the time-resolved plasma emission spectra,and the relationship between the morphology of craters and plasma plume evolution during the femtosecond(fs)laser ablation of sapphire.The Boltzmann plot method and Stark’s broadening model are employed to estimate the temporal temperature and electron density of the plasma plume,revealing the process of plasma evolution.This study aims to demonstrate the feasibility of LIBS for online monitoring of laser processing through experimental data and theoretical explanations.

关 键 词：laser-induced breakdown spectroscopy plasma plume online monitoring SAPPHIRE 

分 类 号：TQ164[化学工程—高温制品工业] O657.319[理学—分析化学]