动态补偿下洁净室空气温湿度计测量误差自动控制  

Automatic Control of Measurement Error of Air Temperature Hygrometer in Clean Room Under Dynamic Compensation

作　　者：马宏俊 MA Hongjun(High Tech Factory Affairs Department,Tsinghua Tongfang Co.,Ltd.,Beijing 100083,China)

机构地区：[1]同方股份有限公司高科技厂务事业部,北京100083

出　　处：《自动化与仪表》2024年第2期21-24,29,共5页Automation & Instrumentation

摘　　要：温湿度计受使用环境差异、设备老化损坏和人为操作失误等影响,测量误差较大,为此,提出动态补偿下的洁净室空气温湿度计测量误差自动控制方法。基于传播系数整合精密露点仪差异、温湿度箱湿度变化、重复测量温湿度计、温湿度计分辨力导致的温度、湿度测量误差数据,引入稳定性函数来描述最大允许温湿度误差的稳定特性,并将该函数作为控制装置的参考。建立温湿度传感器和控制装置之间的数学关系,基于数学关系设计一种适用于此问题的反滤波补偿器,采用递推方式进行周期性的测量误差参数校准与补偿过程,实现动态补偿控制。实验测试结果表明,经由所提方法控制后,可取得与实际结果非常接近的测量结果,将测量误差控制在非常小的范围内,确保温湿度计测量结果具有高精度。The temperature and humidity meter is affected by environmental differences,equipment aging and damage,and human operation errors,resulting in significant measurement errors.Therefore,a dynamic compensation based automatic control method for measurement errors of clean room air temperature and humidity meters is proposed.Based on the propagation coefficient integration of temperature and humidity measurement error data caused by differences in precision dew point meters,changes in temperature and humidity chamber humidity,repeated measurement of temperature and humidity meters,and the resolution of temperature and humidity meters,a stability function is introduced to describe the stability characteristics of the maximum allowable temperature and humidity error,and this function is used as a reference for the control device.Establish a mathematical relationship between temperature and humidity sensors and control devices,design an anti filtering compensator suitable for this problem based on the mathematical relationship,and use recursive methods to perform periodic measurement error parameter calibration and compensation processes to achieve dynamic compensation control.The experimental test results show that after being controlled by the proposed method,measurement results that are very close to the actual results can be obtained,and the measurement error is controlled within a very small range,ensuring that the measurement results of the insulation hygrometer have high accuracy.

关 键 词：动态补偿函数 温湿度计测量误差 反滤波补偿器 传播系数 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置] TH71[自动化与计算机技术—控制科学与工程]