3D打印氧化锆材料在红外探测器中的应用探索  

Exploration of the Application of 3D Printed Zirconia Materials in Infrared Detectors

作　　者：高依然 方志浩 王冠[1] 付志凯 刘亚泽 韩健睿 宁晋杰 GAO Yi-ran;FANG Zhi-hao;WANG Guan;FU Zhi-kai;LIU Ya-ze;HAN Jian-rui;NING Jin-jie(North China Research Institute of Electro-Optics,Beijing 100015,China)

机构地区：[1]华北光电技术研究所,北京100015

出　　处：《红外》2024年第2期18-27,共10页Infrared

摘　　要：杜瓦为红外焦平面探测器提供良好的低温工作环境以及光、机、电、热传输通道。其中冷台面支撑结构作为红外探测器的承载平台,承受设备运输、振动、冲击等作用,对支撑结构的强度提出了更高的要求。因此需要开发新型支撑结构以提高杜瓦的可靠性。根据红外探测器组件低传导漏热、高可靠性的需求,从宏观和微观的角度对不同的支撑结构材料进行分析,对比了两种成型工艺所制备的支撑结构对红外探测器设计制造的影响。与传统加工方式相比,采用数字光处理(Digital Light Procession, DLP)技术成型的氧化锆精度可达到±0.03 mm,与X射线衍射仪(X-Ray Diffractometer, XRD)衍射峰标准卡片符合。这说明其纯度较高,且该技术能缩短工艺时长,优化封装流程。Dewar provides a good low-temperature working environment and light,mechanical,electrical,and thermal transmission channels for infrared focal plane detectors.The cold table support structure serves as the bearing platform of the infrared detector,bearing the effects of equipment transportation,vibration,impact,etc.,which puts higher requirements on the strength of the support structure.Therefore,it is necessary to develop new support structures to improve the reliability of dewar.Based on the demand for low conduction heat leakage and high reliability of infrared detector components,different support structure materials were analyzed from both macroscopic and microscopic perspectives,and the influence of support structures prepared by two molding processes on the design and manufacturing of infrared detectors was compared.Compared with traditional processing methods,the accuracy of zirconia formed by digital light processing(DLP)technology can reach±0.03 mm,which is consistent with the standard card of XRD diffraction peak.This indicates that its purity is high,and this technology can shorten the processing time and optimize the packaging process.

关 键 词：支撑结构 氧化锆 3D打印 红外探测器 杜瓦 

分 类 号：TN215[电子电信—物理电子学]