静电力平衡式MEMS电容薄膜真空计检测电路研究  

Study on Detection Circuit of Electrostatic Servo MEMS Capacitance Diaphragm Vacuum Gauge

作　　者：王绥辉 徐恒通 李刚[1] 韩晓东 孙雯君[1] 成永军[1] 李得天[1] WANG Suihui;XU Hengtong;LI Gang;HAN Xiaodong;SUN Wenjun;CHENG Yongjun;LI Detian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 73000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2024年第2期105-111,共7页Vacuum and Cryogenics

基　　金：国家重点研发计划(2023YFF0717200)。

摘　　要：静电力平衡式MEMS电容薄膜真空计量程宽、稳定性高,具有广阔的应用前景。测量电路是保证静电力平衡式MEMS电容薄膜真空计性能的关键因素。采用交流激励式检测方法,设计了一种微小电容检测电路,并利用软件仿真和实验测试进行验证。结果表明,该电路能够快速检测微小电容并将其转换为直流电压信号,分辨率为0.33 V/pF。此外,抗驱动电压干扰测试表明,该电路能够在1~100 V范围的直流驱动电压下正常工作,电容测量的输出电压最大标准差为0.010 249 V,并且具有优异的稳定性。The electrostatic servo MEMS capacitance diaphragm vacuum gauge has wide range and high stability,and has broad application prospect.The measurement circuit is the key factor to ensure the performance of the electrostatic servo MEMS capacitance diaphragm vacuum gauge.A micro capacitance detection circuit is designed by using AC excitation detection method,and verified by software simulation and experiment.The results show that the circuit can quickly detect small capacitors and convert them into DC voltage signals with a resolution of 0.33 V/pF.In addition,the anti-drive voltage interference test shows that the circuit can work normally at DC drive voltages in the range of 1~100 V,and the maximum variance of capacitance measurement is 0.010249 V,which has excellent stability.

关 键 词：静电力平衡式MEMS电容薄膜真空计 微小电容检测 交流激励式 抗驱动电压干扰 

分 类 号：TB772[一般工业技术—真空技术]