不同金属镀层单晶硅靶板的冲击受力特性  

Monocrystalline Silicon Target Plates Impact Force Characteristics with Different Metal Coatings

作　　者：代锋琪 刘双杰[1] 郝永平[1,2] 刘凤丽[2] DAI Fengqi;LIU Shuangjie;HAO Yongping;LIU Fengli(School of Equipment Engineering,Shenyang University of Technology,Shenyang 110159,China;School of Mechanical Engineering,Shenyang University of Technology,Shenyang 110159,China)

机构地区：[1]沈阳理工大学装备工程学院,辽宁沈阳110159 [2]沈阳理工大学机械工程学院,辽宁沈阳110159

出　　处：《探测与控制学报》2024年第1期114-120,共7页Journal of Detection & Control

基　　金：沈阳理工大学“光选学者”计划项目;辽宁省教育厅基金项目(LJKMZ20220601)。

摘　　要：为了探究金属镀层对单晶硅靶板抗冲击性能的影响,建立了金属/单晶硅复合靶板理论分析模型,分析讨论了单晶硅靶板表面的最大应力与镀层材料动态屈服应力的关系,应用有限元法在LS-DYNA软件中对金属/单晶硅复合靶板进行瞬态动力学计算,得到了不同金属镀层单晶硅靶板冲击受力后的力学响应。根据实验结果总结得到金属镀层对单晶硅靶板冲击受力具有一定的抗冲击效果,能够延迟和减弱出现在靶板正、背面的应力峰值,减小在靶板上产生的应力。In order to investigate the influence of metal coating on the impact resistance of monocrystalline silicon target plate,a theoretical analysis model of metal/monocrystalline silicon composite target plate was established,the relationship between the maximum stress on the surface of monocrystalline silicon target plate and the dynamic yield stress of the coating material was analyzed and discussed,the transient dynamics calculation of metal/monocrystalline silicon composite target plate was carried out in LS-DYNA software by applying the finite element method,and the mechanical response of monocrystalline silicon target plate with different metal coatings after impact was obtained.The mechanical response of the single-crystal silicon target plate with different metal coatings was obtained after being stressed.Based on the experimental results,it was concluded that the metal coating had a certain anti-impact effect on the impact stress of single-crystal silicon target plate,which could delay and weaken the stress peaks appearing on the front and back of the target plate and reduce the stress generated on the target plate.

关 键 词：单晶硅 复合靶板 理论分析模型 动态屈服应力 动力学 

分 类 号：TJ04[兵器科学与技术—兵器发射理论与技术]