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作 者:叶纪龙 张榕贵 李来超 李玉虎 马艳丽 Ye Jilong;Zhang Ronggui;Li Laichao;Li Yuhu;Ma Yanli(School of Metallurgical Engineering,Jiangxi University of Science and Technology,Ganzhou 341000,Jiangxi;Xiamen University,Xiamen 361005,Fujian)
机构地区:[1]江西理工大学冶金工程学院,江西赣州341000 [2]厦门大学,福建厦门361005
出 处:《福建冶金》2024年第2期52-56,共5页Fujian Metallurgy
基 金:国家重点研发计划项目(2020YFB1713700);国家自然科学基金资助项目(52264048);江西省双千计划人才项目(jxsq2018106051);江西理工大学清江青年拔尖支持计划(JXUSTQJBJ2018005)。
摘 要:掺杂钆镓石榴石(SGGG)晶体是一种性能优越的YIG液相外延片材料,解决SGGG基片内部均一性问题对生长合格的YIG外延片具有重要意义。本文采用固相法合成多晶料技术,考察了碳酸钙、碳酸镁、草酸钆等盐类化合物高温下反应生成SGGG多晶料规律,查明了掺杂元素、长晶温场对SGGG品质的影响。结果表明,使用碳酸钙、碳酸镁、草酸钆等盐类化合物有助于提高SGGG多晶料合成品质,弧顶式长晶温场生长的SGGG晶体内部质量良好,且所得切片晶胞参数满足YIG外延片使用需求。Subsitude gadolinium gallium garnet(SGGG)crystal is a kind of YIG liquid phase epitaxial wafer material with superior performance.Solving the internal uniformity problem of the SGGG substrate is of great significance to the growth of qualified YIG epitaxial wafers.This article uses solid-state method to synthesize polycrystalline materials,investigates the rules of the reaction of calcium carbonate,magnesium carbonate,gadolinium oxalate and other salt compounds at high temperatures to produce SGGG polycrystalline materials,and identifies the influence of doping elements and crystal growth temperature field on the quality of SGGG.Influence.The results show that the use of calcium carbonate,magnesium carbonate,gadolinium oxalate and other salt compounds can help improve the synthesis quality of SGGG polycrystalline materials.The internal quality of the arc-top long crystal temperature field grown SGGG crystal is good,and the obtained slice unit cell parameters meet the YIG Epitaxial wafer usage requirements.
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