高功率垂直腔面发射激光器阵列热特性  

Thermal characteristics of high-power vertical cavity surface emitting laser array

作　　者：闫观鑫 郝永芹 张秋波 Yan Guan-Xin;Hao Yong-Qin;Zhang Qiu-Bo(National Key Lab of High-Power Semiconductor Lasers,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]长春理工大学,高功率半导体激光国家重点实验室,长春130022

出　　处：《物理学报》2024年第5期133-138,共6页Acta Physica Sinica

基　　金：吉林省科技发展计划(批准号:20200401073GX)资助的课题.

摘　　要：为了改善垂直腔面发射激光器(VCSEL)阵列的热特性,提高器件的可靠性,本文基于有限元模型,研究了不同单元间距、排布方式对阵列器件的热串扰现象、热扩散性能的影响.在理论分析的基础上,制备了几种不同排布方式的VCSEL阵列器件,并对其进行测试分析.结果显示,相较于正方形排布方式,新型排布方式器件具有更高的输出功率,同时阈值电流也有所降低.其中五边形排布方式的器件表现出最佳的性能,其输出功率高达150 mW,比正方形排布方式提高了约73%.这表明通过调整阵列单元的间距、排列方式,可以使各单元间的热串扰现象得到有效改善,降低器件的热效应,进而降低器件温度,提高输出特性.Due to the excellent characteristics such as good beam quality,dynamic single-longitudinal mode,low power consumption,and good wavelength stability,especially easy-to-integrate high-density 2D area arrays,vertical-cavity surface-emitting laser(VCSEL)is widely used in optical identification,optical interconnection systems,optical data storage and other fields.In recent years,with the improvement of materials and process technology,VCSEL has played an increasingly important role in the fields of smartphone face recognition,drone obstacle avoidance,virtual reality/augmented reality(VR/AR),sweeping robots,home cameras,etc.,and with the rapid development and application of 5G communication,VCSEL will become an indispensable main component.However,due to the introduction of distributed Bragg mirrors,the thermal effect of VCSEL is very serious,especially when VCSEL is integrated into an array device,current-induced self-heating of each individual array cell and the thermal coupling among array cells have become the major factors contributing to thermal rollover and hence restraining the optical output performance of the VCSEL arrays.Therefor it is of great significance to study the thermal characteristics of VCSELs,in order to solve the problem of thermal crosstalk between single-tube devices,and increase the life of the device.This paper analyzes the influence of cell spacing and arrangement on the thermal crosstalk phenomenon and thermal diffusion performance of VCSEL array device based on the finite element model.The simulation results show that the maximum temperature of the device decays exponentially with the increase of cell spacing,the thermal crosstalk phenomenon and thermal diffusion performance of VCSEL array devices are significantly improved.When the cell spacing is 120μm,the influence between the cells is small,the thermal crosstalk phenomenon is significantly improved,and the heat dissipation effect is better.On this basis,four non-square VCSEL arrays with 16 cells are designed,and it can be seen that co

关 键 词：垂直腔面发射激光器 阵列 热串扰 排布方式 

分 类 号：TN248[电子电信—物理电子学]