基于超快激光定域去除的Cu/Ag复合金属网格透明电极性能优化研究  

Study on performance optimization of transparent Cu/Ag composite metal mesh electrode based on localized removal with ultrafast laser

作　　者：王轶伦[1,2,3] 李双双 李保家 WANG Yilun;LI Shuangshuang;LI Baojia(School of Mechanical Engineering and Rail Transit,Changzhou University,Changzhou 213164,China;School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China;New United Group Co.,Ltd.,Changzhou 213166,China;School of Intelligent Manufacturing,Changzhou Vocational Institute of Engineering,Changzhou 213164,China;School of Materials Science&Engineering,Jiangsu University,Zhenjiang 212013,China)

机构地区：[1]常州大学机械与轨道交通学院,江苏常州213164 [2]江苏大学机械工程学院,江苏镇江212013 [3]新誉集团有限公司,江苏常州213166 [4]常州工程职业技术学院智能制造学院,江苏常州213164 [5]江苏大学材料科学与工程学院,江苏镇江212013

出　　处：《电镀与涂饰》2024年第2期53-61,共9页Electroplating & Finishing

基　　金：常州大学科研启动经费项目(ZMF21020357)。

摘　　要：[目的]Ag网格透明电极方块电阻低,但反射率高。[方法]在钠钙玻璃基底表面利用等离子射频磁控溅射沉积Cu/Ag复合金属薄膜,然后采用飞秒脉冲激光定域去除金属层,获得Cu/Ag复合金属网格透明电极。分析了激光能量密度、激光扫描速率和激光扫描线重叠率对电极材料去除的影响机制。[结果]在激光能量密度1.4 J/cm^(2)、激光扫描速率300 mm/s和激光扫描线重叠率70%的工艺参数下获得了综合光电性能最为出色的Cu/Ag复合金属网格透明电极,其平均透光率为87.58%,方块电阻为2.15Ω,品质因子为1.235×10^(-1)Ω^(-1)。[结论]该电极的综合性能与传统商用ITO(掺锡氧化铟)透明电极相比有巨大提升。[Introduction]The transparent Ag mesh electrode has low sheet resistance but high reflectivity.[Method]A Cu/Ag composite metal film was deposited on the surface of soda-lime glass by plasma radio frequency(RF)magnetron sputtering,and then locally removed by femtosecond pulsed laser,forming a transparent Cu/Ag composite metal mesh electrode.The effects of laser fluence,laser scanning speed,and laser scanning line overlap ratio on the removal of electrode material were discussed.[Result]The transparent Cu/Ag composite metal mesh electrode fabricated at laser fluence 1.4 J/cm^(2),laser scanning speed 300 mm/s,and laser scanning line overlap ratio 70%exhibited an average optical transmittance of 87.58%,a sheet resistance of 2.15Ω,and a figure of merit of 1.235×10^(-1)Ω^(-1),showing the best photoelectric properties.[Conclusion]The comprehensive performance of the transparent Cu/Ag composite metal mesh electrode is much better than that of the commercial ITO(indium tin oxide)transparent electrode.

关 键 词：金属网格 超快激光 定域去除 透明电极 光电性能 

分 类 号：TB43[一般工业技术]