压敏结构对柔性传感器性能增强的仿真分析  

Simulation and analysis on pressuresensitive structure enhancing performance of flexible sensor

作　　者：魏国 廖宁波[1,2] 章城 WEI Guo;LIAO Ningbo;ZHANG Cheng(College of Mechanical and Electrical Engineering,Wenzhou University,Wenzhou 325035,China;Zhejiang Key Laboratory of Laser Processing Robot,Laser Processing Robot Demonstration International Science and Technology Cooperation Base,Wenzhou 325035,China)

机构地区：[1]温州大学机电工程学院,浙江温州325035 [2]浙江省激光加工机器人重点实验室激光加工机器人示范型国际科技合作基地,浙江温州325035

出　　处：《传感器与微系统》2024年第3期26-30,共5页Transducer and Microsystem Technologies

基　　金：浙江省自然科学基金资助项目(LQ20E050023);温州市基础性工业科技项目(G20190014)。

摘　　要：在压阻层引入压敏结构是提高压阻传感器灵敏度的有效方法,但是压敏结构的形变在实际实验中难以直接观察,使得微结构的形变、电阻变化等机制尚不明确。为此,采用有限元仿真分析软件,模拟不同载荷大小和不同敏感结构对石墨烯基柔性传感器压敏结构的作用机制,揭示了压敏结构对传感器形变、电阻变化的影响。结果显示,方柱和圆柱压敏结构的传感器形变程度小,但电阻和应力变化区域大,而金字塔和半圆球压敏结构的传感器形变程度较大,但电阻和应力变化区域较小。Introducing pressure-sensitive structure into the piezoresistive layer is an effective method to improve the sensitivity of piezoresistive sensor,but the deformation of pressure-sensitive structure is difficult to observe directly in practical experiments,so the mechanism of microstructure deformation and resistance change is not clear.Therefore,the finite element simulation analysis software is used to simulate the action mechanism of different load sizes and sensitive structure on the pressure-sensitive structure of graphene-based flexible sensor,and reveal the influence of the pressure-sensitive structure on the deformation and resistance change of the sensor.The results show that the sensor with square column and cylindrical pressure-sensitive structure has small deformation degree,but the change area of resistance and stress is large,while the sensor with pyramid and semi-circular ball pressure-sensitive structure has large deformation degree,but the change area of resistance and stress is small.

关 键 词：柔性 压阻传感器 压敏结构 有限元分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]