基于光偏转原理的AFM光电检测系统设计  

Design of AFM photoelectric detection system based on light deflection principle

作　　者：王旭东[1,2] 温阳 王慧云 秦丽 温焕飞[1,2] 马宗敏 WANG Xudong;WEN Yang;WANG Huiyun;QIN Li;WEN Huanfei;MA Zongmin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,山西太原030051 [2]中北大学仪器与电子学院,山西太原030051

出　　处：《传感器与微系统》2024年第3期76-79,共4页Transducer and Microsystem Technologies

基　　金：科技部国家重点研发计划资助项目(2018YFF01012502);国家自然科学基金资助项目(61874100);山西省重点研发计划资助项目(201803D421037);山西“1331工程”重点学科建设建设项目(1331KSC)。

摘　　要：利用光偏转原理设计并实现了原子力显微镜(AFM)的光电检测系统,研究了影响光偏转噪声的影响因素。设计了新型螺旋式嵌套结构调节准直光斑,使激光发散角降低到0.053°,利用压电陶瓷特性设计了高精度三维调节结构,可以在α,β,γ方向精准调节偏转角度,36mm的聚焦焦距满足了小型化、集成化的设计目标。基于该高灵敏度光电检测系统的设计,AFM系统得到了清晰的硅材料表面台阶结构,系统分辨率达到了0.1nm,为今后的亚原子测量奠定了实验基础。The photoelectric detection system of atomic force microscope(AFM)is designed and realized by light deflection principle,and the influencing factors of light deflection noise are studied.A new type of spiral nested structure is designed to adjust the collimating spot,which reduces the laser divergence angle to 0.053°.A high-precision three-dimensional(3D)adjustment structure is designed by using the characteristics of piezoelectric ceramics,which can precisely adjust the deflection angle in theα,β,andγdirections.The focusing focal length of 36 mm meets the design goals of miniaturization and integration.Based on the design of the high-sensitivity photoelectric detection system,the AFM system obtains a clear step structure on the surface of silicon material,and the system resolution reaches 0.1 nm,which lays an experimental foundation for future subatomic measurements.

关 键 词：原子力显微镜 光偏转 准直调节 压电陶瓷 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH742[自动化与计算机技术—控制科学与工程]