基于牺牲层工艺的CMUT阵列设计制造及性能表征  

Design,manufacture and performance characterization of CMUT array based on sacrificial layer process

作　　者：梁永 孟繁胜 王任鑫 张国军 贾利成 张文栋 LIANG Yong;MENG Fansheng;WANG Renxin;ZHANG Guojun;JIA Licheng;ZHANG Wendong(State Key Laboratory of Dynamic Measurement Technology,School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院省部共建动态测试技术国家重点实验室,山西太原030051

出　　处：《传感器与微系统》2024年第3期108-111,共4页Transducer and Microsystem Technologies

基　　金：国家基金委重大科研仪器研制项目(61927807);中国博士后科学基金资助项目(2023M733277);山西省青年科学基金资助项目(202203021222025)。

摘　　要：电容式微机械超声换能器(CMUT)具备比压电式超声换能器微型化、高密度阵元集成、高机电耦合系数等优势,在医学成像、流量测量等领域展现出巨大的潜力。本文基于牺牲层释放工艺,设计并成功制造了高密度集成的微型CMUT阵元,在水中对其进行了性能测试和表征。实验结果显示,该换能器具有优异的发射线性度(非线性度为0.74%),以及良好的发射和接收灵敏度。此外,轴向声压衰减趋势符合负指数衰减规律,并且具备出色的指向性能(-6dB主瓣宽度为26°),同时旁瓣干扰极小。Capacitive micromachined ultrasonic transducer(CMUT)has the advantages of miniaturization,high density array integration and high electromechanical coupling coefficient compared with piezoelectric ultrasonic transducer,which shows great potential in medical imaging,flow measurement.Based on the sacrificial layer release process,a high density integrated micro CMUT array is designed and successfully manufactured.The performance of the CMUT array is tested and characterized in water.The experimental results show that the transducer has excellent transmitting linearity(nonlinear degree is 0.74%)and good transmitting and receiving sensitivity.In addition,the axial sound pressure attenuation trend follows the negative exponential attenuation rule and has excellent directional performance(-6 dB main lobe width of 26°)with minimal sidelobe interference.

关 键 词：电容式微机械超声换能器 牺牲层释放工艺 线性度 发射灵敏度 指向性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB552[自动化与计算机技术—控制科学与工程]