用于人体运动监测的双层柔性应变传感器  

Double-layer flexible strain sensor for human motion monitoring

作　　者：朱雅倩 汪鹏飞 李育文 黄英 刘彩霞 ZHU Yaqian;WANG Pengfei;LI Yuwen;HUANG Ying;LIU Caixia(School of Microelectronics,Hefei University of Technology,Hefei 230601,China)

机构地区：[1]合肥工业大学微电子学院,安徽合肥230601

出　　处：《传感器与微系统》2024年第3期159-163,共5页Transducer and Microsystem Technologies

摘　　要：针对用于智能可穿戴设备的柔性应变传感器所存在的问题,提出一种通过使用逐层(LBL)组装技术和借助激光钢网模具在上导电层表面制造出规则裂纹结构的方法制备出基于双层导电结构(石墨烯/水性聚氨酯(GR/WPU)层和炭黑/水性聚氨酯(CB/WPU)层)的柔性应变传感器。该传感器具有高灵敏度系数(GF为466~1569)、宽工作范围(高达100%的应变)、出色的耐久性(1000次)、低检测极限(0.25%的应变)、快速响应时间(86 ms)以及良好的回弹性等优良特性,这使传感器不仅可以精确检测由于大幅度关节运动产生的信号,还可以对细微的生理信号进行实时监测,在未来的电子皮肤、人机互动和智能可穿戴设备领域具有广阔的应用前景。Aiming at the problem of flexible strain sensors used for smart wearable devices,a method for preparing flexible strain sensor based on a bilayer conductive structure,graphene/WPU(GR/WPU)layer and carbon black/waterborne polyurethane(CB/WPU)layer is proposed by using layer-by-layer(LBL)assembly technique and creating regular crack structure on the surface of the upper conductive layer with the aid of a laser steel mesh die.The sensor has excellent properties such as a high sensitivity factor GF of 466 to 1569,a wide operating range up to 100%strain,excellent durability of 1000 cycles,low detection limit of 0.25%strain,fast response time of 86 ms and good resilience,which allows the sensor to accurately detect signals due to large joint movements,but also to monitor subtle physiological signals in real-time,and has broad application prospects in the future in the fields of electronic skin,human-machine interaction and smart wearable devices.

关 键 词：双层导电结构 逐层组装 高灵敏度 宽工作范围 微表情 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]