无线无源多栅格结构式温压传感器设计与制备  

Design and Fabrication of Wireless Passive Multi-Grid Structural Temperature and Pressure Sensors

作　　者：张子瑞 高尚 Zhang Zirui;Gao Shang(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学机械工程学院,南京210094

出　　处：《微纳电子技术》2024年第3期112-119,共8页Micronanoelectronic Technology

摘　　要：针对高温、高压等恶劣环境下的温度和压力参数测量,基于微波散射原理和高温共烧陶瓷(HTCC)技术设计了一种无线无源多栅格结构式温压传感器,能够实现25~800℃内温度的测量和0~300 kPa内压力的测量。使用高频电磁仿真软件对传感器进行结构设计,使所测参数与传感器回波损耗(S11)具有线性关系,然后通过传感器制备与实验对传感器性能开展验证。测试结果表明,在测量范围内,无线无源多栅格结构式温压传感器具有良好的可靠性和线性度,温度平均灵敏度为423 kHz/℃,压力灵敏度为209 kHz/kPa,温度和压力的最大相对测量误差分别为3.1%和1.13%。Aiming at the measurement of temperature and pressure parameters in harsh environments such as high temperature and high pressure,wireless passive multi-grid structural temperature and pressure sensors based on microwave scattering principles and high-temperature co-fired ceramic(HTCC)technology were designed,which can measure temperatures within 25-800℃and pressures within 0-300 kPa.The structure of the sensor was designed by using high-frequency electromagnetic simulation software,ensuring a linear relationship between the measured parameters and the sensor's return loss(S11).Subsequently,performance validation of the sensor was carried out through sensor fabrication and experiment.The test results show that within the measured range,the wireless passive multi-grid structural temperature and pressure sensors exhibit good reliability and linearity.The average sensitivity to temperature is 423 kHz/℃,the sensitivity to pressure is 209 kHz/kPa,and the maximum relative measurement errors are 3.1%and 1.13%for temperature and pressure,respectively.

关 键 词：压力传感器 高温共烧陶瓷(HTCC) 温度传感器 无线无源 有限元分析 谐振频率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]