YSZ基极限电流型NO_(x)传感器研究进展  

Research progress on YSZ based limit current type NO_(x)sensors

作　　者：杨凯中 袁春 董文 傅邱云[1,2] YANG Kaizhong;YUAN Chun;DONG Wen;FU Qiuyun(School of Photonic and Electronic Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;Research Institute of Huazhong University of Science and Technology in Shenzhen,Shenzhen 518063,Guangdong Province,China;Shenzhen Sensor Technology Co.,Ltd.,Shenzhen 518038,Guangdong Province,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]深圳华中科技大学研究院,广东深圳518063 [3]深圳市森世泰科技有限公司,广东深圳518038

出　　处：《电子元件与材料》2024年第1期1-13,共13页Electronic Components And Materials

基　　金：深圳市科技研发技术攻关重点项目(JSGG20220831095600002)。

摘　　要：随着汽车尾气排放标准更加严格,NO_(x)传感器作为主要排放处理技术-选择性催化还原系统(SCR)的核心部件成为当下的研究热点。YSZ作为固体电解质的极限电流型传感器在监测精度和控制成本上有着显著作用。综述了近年极限电流型氧传感器和NO_(x)传感器的研究进展。介绍了传感器的历史发展、结构和工作机理。重点阐述了扩散层、电极层的材料选择和结构组成对传感器性能的影响。基于目前集成MEMS气体薄膜传感器的发展以及传感单元结构多腔耦合组合模型的不断完善,提出未来亟待解决的问题,预测可能的发展方向。As automotive exhaust emission standards get increasingly stringent,NO_(x)sensor,as a key component of the selective catalytic reduction(SCR)system,has become a current research hotspot.The YSZ-based limit current type sensor plays a significant role in monitoring accuracy and controlling costs.The review summarizes the recent research progress on limit current type oxygen sensors and NO_(x)sensors.It introduces the historical development,structure,and working principles of the sensors.The focus is placed on elucidating the impact of material selection and structural composition of diffusion and electrode layers on the performance of the sensors.Based on the current development of integrated MEMS gas thin film sensors and the continuous improvement of coupled multi-cavity models for sensing units,this review presents the unresolved issues that need to be addressed in the future and predicts possible directions for development.

关 键 词：极限电流 氮氧化物 综述 气体传感器 尾气监测 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置] O646.5[自动化与计算机技术—控制科学与工程]