洁净室内AMC治理方法研究  

Research on the Methods of Airborne Molecular Continents in Clean Room

作　　者：王雄 刘菊 Wang Xiong;Liu Ju(EDRI,Chengdu,610056)

机构地区：[1]信息产业电子第十一设计研究院科技工程股份有限公司,成都610056

出　　处：《制冷与空调（四川）》2024年第1期148-154,共7页Refrigeration and Air Conditioning

摘　　要：气态分子级污染物(Airborne Molecular Continent,AMC)是影响洁净室生产环境的主要因素之一,因此控制洁净室内AMC浓度成了半导体行业发展的关键问题之一。分别从“防”与“治”两个方面阐述了有效控制室内AMC浓度的方法,提供了室外新风的不同处理方式及应用场景,提供了洁净室内装修材料选用的标准及依据,研究了面板行业敏感度较高的VOCs(Volatile Organic Compounds)的相关处理方式及应用场景,为后续相关洁净室设计提供了参考及工程实际意义。Airborne Molecular Continent(AMC)is one of the main factors affecting the production environment of cleanrooms,and therefore the control of indoor AMC concentration in clean rooms has become one of the key issues for the development of the semiconductor industry.This paper described the methods of effectively controlling indoor AMC concentration from the aspects of"prevention"and"treatment",provided different treatment methods and application scenarios of outdoor fresh air,provided the standards and basis for the selection of decoration materials in clean room,and researched the sensitivity of VOCs in the panel industry,which is highly sensitive.It also studies the treatment and application scenarios of VOCs(Volatile Organic Compound),which is highly sensitive in the panel industry,and provided references and practical significance for the subsequent design of related cleanrooms.

关 键 词：洁净室设计 AMC VOCS 

分 类 号：X51[环境科学与工程—环境工程]