Vertical serpentine interconnect-enabled stretchable and curved electronics  

作　　者：Rui Jiao Ruoqin Wang Yixin Wang Yik Kin Cheung Xingru Chen Xiaoyi Wang Yang Deng Hongyu Yu 

机构地区：[1]Department of Mechanical and Aerospace Engineering,The Hong Kong University of Science and Technology,Kowloon,Hong Kong SAR 999077,China [2]HKUST Shenzhen-Hong Kong Collaborative Innovation Research Institute,Shenzhen,Guangdong 518045,China

出　　处：《Microsystems & Nanoengineering》2023年第6期165-174,共10页微系统与纳米工程（英文）

基　　金：supported by grants from the Innovation and Technology Commission(project:ITS-192-20FP)of HKSAR;the Research Grants Council of Hong Kong under the General Research Fund under Grant 16200919;Shenzhen-Hong Kong-Macao S&T Program(Category C,Grant No.SGDX20210823103200004);Hetao Shenzhen-Hong Kong Science and Technology Innovation Cooperation Zone under Project HZQB-KCZYB-2020083.

摘　　要：Stretchable and curved electronic devices are a promising technology trend due to their remarkable advantages.Many approaches have been developed to manufacture stretchable and curved electronics.Here,to allow such electronics to better serve practical applications,ranging from wearable devices to soft robotics,we propose a novel vertical serpentine conductor(VSC)with superior electrical stability to interconnect functional devices through a silicon-based microfabrication process.Conformal vacuum transfer printing(CVTP)technology was developed to transfer the networked platform onto complex curved surfaces to demonstrate feasibility.The mechanical and electrical performance were investigated numerically and experimentally.The VSC interconnected network provides a new approach for stretchable and curved electronics with high stretchability and reliability.

关 键 词：curved network ELECTRICAL 

分 类 号：TN6[电子电信—电路与系统]