双波长同步干涉检测中基于莫尔条纹加乘变换的合成波长载频交叠干涉术  

Synthetic-Wavelength Carrier Squeezing Interferometry with the Additive-to-Multiplicative MoiréFringe Transition in Simultaneous Dual-Wavelength Interferometry

作　　者：成金龙 葛恒清[1] 边心田[1] 左芬[1] 程菊[1] 徐丽萍 CHENG Jinlong;GE Hengqing;BIAN Xintian;ZUO Fen;CHENG Ju;XU Liping(School of Physics and Electronic Electrical Engineering,Huaiyin Normal University,Huai’an Jiangsu 223300,China)

机构地区：[1]淮阴师范学院物理与电子电气工程学院,江苏淮安223300

出　　处：《电子器件》2024年第1期284-300,共17页Chinese Journal of Electron Devices

基　　金：国家自然科学基金(62105116);江苏省高等学校基础科学(自然科学)研究面上项目(21KJB140004);淮阴师范学院引进人才科研启动项目(31CJL00)。

摘　　要：双波长同步干涉测量(SDWI)能够以更高的效率扩展传统单波长干涉测量的测量范围。但是难以直接从双波长同步干涉测量中生成的加性莫尔条纹包络线中解耦提取所需波长较长的拍频合成波长(λs)信息。本文提出了一种从加性莫尔条纹图中提取相位分布信息的合成波长载频交叠干涉术。通过莫尔条纹加乘转换,在得到乘性莫尔条纹图中,合成波长的干涉信息以叠加形式独立于其他波长的干涉信息。随后,从4帧乘性莫尔条纹图的频谱滤波提取出相移为π/2的合成波长移相干涉图。最后,对提取的4帧合成波长移相干涉图进行重新排列合成单一时空条纹图(STF)。通过将时域相移转换为空域载频,利用频谱滤波和傅里叶逆变换提取出合成波长的测试相位。与传统的双波长空域傅里叶变换解调理论相比,本论文方法在不消除背景分量的情况下,所需空域线性载频仅为前者的0.127倍左右。仿真和实验结果验证了本文方法的可行性和适用性。Simultaneous dual-wavelength interferometry(SDWI)supplies a better solution to extend the measurement range of traditional single-wavelength interferometry with higher efficiency.However,to decompose the needed longer beat-frequency synthetic-wavelength(λs)information is rather arduous from the envelope of the generated additive Moiréfringe in SDWI.In this study,a synthetic-wavelength carrier squeezing interferometry(SCSI)method is proposed to retrieve the synthetic-wavelength phase from the additive Moiréfringe pat-tern.By additive-to-multiplicative Moiréfringe transition,the interferometric information ofλs is independent and appeared as the superpo-sition of other wavelengths interferometric information in the obtained multiplicative Moiréfringe pattern.Subsequently,4-frame synthetic-wavelength interferogram withπ/2 phase shift could be extracted from the spectrum of the multiplicative Moiréfringe pattern.Finally,the extracted 4-frame interferogram are rearranged and combined into a single spatial-temporal fringe(STF).By converting the temporal phase shift into spatial carrier,the measured phase ofλs could be retrieved by the filter and inverse Fourier transform from the spectrum of STF.And compared with traditional dual-wavelength spatial-domain Fourier transform demodulation theory,the necessary linear carrier in SCSI method is merely about 0.127 times of the former even though without the elimination of background.The feasibility and applicability of the SCSI method are verified using simulation and experimental results.

关 键 词：干涉仪 相位测量 双波长 莫尔条纹 

分 类 号：O439[机械工程—光学工程]