Laser patterning of large-scale perovskite single-crystal-based arrays for single-mode laser displays  

作　　者：Wangqi Mao Haonan Li Bing Tang Chi Zhang Liang Liu Pei Wang Hongxing Dong Long Zhang 

机构地区：[1]Department of Optics and Optical Engineering,University of Science and Technology of China,Hefei,Anhui 230026,People’s Republic of China [2]Key Laboratory of Materials for High-Power Laser,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,People’s Republic of China [3]Department of Materials Science and Engineering,and Centre for Functional Photonics(CFP),City University of Hong Kong,Hong Kong Special Administrative Region of China 999077,People’s Republic of China [4]School of Physics and Optoelectronic Engineering,Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou,Zhejiang 310024,People’s Republic of China [5]Key Laboratory for Micro/Nano Physics and Technology of Hunan Province,State Key Laboratory of Chemo/Biosensing and Chemometrics,College of Materials Science and Engineering,Hunan University,Changsha 410082,People’s Republic of China

出　　处：《International Journal of Extreme Manufacturing》2023年第4期462-470,共9页极端制造（英文）

基　　金：the support from the National Natural Science Foundation of China (No. 61925506);the Natural Science Foundation of Shanghai (No. 20JC1414605);Hangzhou Science and Technology Bureau of Zhejiang Province (No. TD2020002);the Academic/Technology Research Leader Program of Shanghai (23XD1404500)

摘　　要：Lead halide perovskites have attracted considerable attention as potential candidates for high-performance nano/microlasers,owing to their outstanding optical properties.However,the further development of perovskite microlaser arrays(especially based on polycrystalline thin films)produced by the conventional processing techniques is hindered by the chemical instability and surface roughness of the perovskite structures.Herein,we demonstrate a laser patterning of large-scale,highly crystalline perovskite single-crystal films to fabricate reproducible perovskite single-crystal-based microlaser arrays.Perovskite thin films were directly ablated by femtosecond-laser in multiple low-power cycles at a minimum machining line width of approximately 300 nm to realize high-precision,chemically clean,and repeatable fabrication of microdisk arrays.The surface impurities generated during the process can be washed away to avoid external optical loss due to the robustness of the single-crystal film.Moreover,the high-quality,large-sized perovskite single-crystal films can significantly improve the quality of microcavities,thereby realizing a perovskite microdisk laser with narrow linewidth(0.09 nm)and low threshold(5.1µJ/cm2).Benefiting from the novel laser patterning method and the large-sized perovskite single-crystal films,a high power and high color purity laser display with single-mode microlasers as pixels was successfully fabricated.Thus,this study may offer a potential platform for mass-scale and reproducible fabrication of microlaser arrays,and further facilitate the development of highly integrated applications based on perovskite materials.

关 键 词：perovskite single-crystal film single-mode microlaser femtosecond-laser processing laser display Supplementary material for this article is available online 

分 类 号：TN249[电子电信—物理电子学] TB383.2[一般工业技术—材料科学与工程]