面向多目标集成优化与二次烧结工艺的SiC反射镜组件超轻量化结构设计  

Design of Ultra-lightweight structure SiC mirror assembly for multi-objective iintegrated optimization and ssecondary sintering process

作　　者：谢新旺 殷龙海 李延伟 李骏驰 张晓辉 李建杰 XIE Xinwang;YIN Longhai;LI Yanwei;LI Junchi;ZHANG Xiaohui;LI Jianjie(Ji Hua Laboratory,Foshan 528200,China)

机构地区：[1]季华实验室,广东佛山528200

出　　处：《光学技术》2024年第1期1-6,47,共7页Optical Technique

基　　金：国家重点研发计划(2016YFBO500301)。

摘　　要：为了满足高精密空间光学设备超轻量化要求,运用参数优化技术、有限元分析与先进碳化硅(SiC)制造技术,提出了一种多目标集成优化与二次烧结工艺相结合的Φ600mm反射镜组件超轻量化结构设计方法。X、Z两个方向上的SiC反射镜面形的均方根值(RMS)、重量为优化目标,将反射镜轴向厚度、镜面厚度等参数作为设计变量,获得了轻量化率为90.55%的超轻量化反射镜结构;提出反射镜支撑结构同样采用SiC材料,利用二次烧结工艺方法,将两者直接烧结成型,减少粘接装配环节,获得了轻量化率为92%的反射镜组件;利用有限元分析与试验对超轻量化结构设计方法的正确性和合理性进行了验证。结果表明:在重力载荷、温度载荷、镜面加工残差的综合影响下,反射镜组件面形误差RMS值为10.034nm,优于12.6nm的设计要求,且动态刚度良好,满足使用要求。In order to meet the requirements of ultra-lightweight high precision space optical equipment,an ultra-lightweight structure design method ofΦ600mm mirror assembly combined with multi-objective integrated optimization and secondary sintering process was proposed by using parameter optimization technology,finite element analysis and advanced SiC manufacturing technology.Firstly,the root mean square value(RMS)and weight of the sic mirror shape in the X and Z directions were taken as the optimization objective,and the axial thickness of the mirror and the thickness of the mirror surface were taken as the design variables,the ultra-lightweight mirror structure with a lightweight rate of 90.55%was obtained.Secondly,the mirror supporting structure is also made of SiC material,the mirror and support are directly sintered by using the secondary sintering process method to reduce the bonding assembly link,and the mirror assembly with a lightweight rate of 92%is obtained.Finally,using the finite element analysis and test of ultra-low weight the correctness and rationality of the structure design method is verified.The results show that under the comprehensive influence of gravity load,temperature load and mirror machining residual,the RMS value of mirror assembly surface error is 10.034nm,which is better than the design requirements of 12.6nm,and the dynamic stiffness is good,which meets the requirements of use.

关 键 词：参数优化 超轻量化结构 面形误差 结构刚度 

分 类 号：V447.1[航空宇航科学与技术—飞行器设计]