基于低粘度硅油波动的动态干涉仪误差标定  

Error calibration of dynamic interferometer based on low-viscosity silicone oil fluctuation

作　　者：钱月 郑东晖[1] 胡晨辉 马致遥 张喆 陈磊[1] QIAN Yue;ZHENG Donghui;HU Chenhui;MA Zhiyao;ZHANG Zhe;CHEN Lei(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学技术》2024年第1期7-13,共7页Optical Technique

基　　金：中央高校基本科研业务费专项资金(30923010934);国家自然科学基金(62005122);江苏省自然科学基金(BK20200458)。

摘　　要：液面绝对检验法通常以高粘度液体平面作为基准标定光学平晶的平整度,基准液面的稳定时间及受干扰后恢复时间长。文章提出动态液面绝对检验法,采用动态干涉仪测量低粘度硅油表面的动态面形,将其平均值作为基准面,用于标定干涉仪的系统误差。基于多维模态分析原理,建立液面波动模型,使用有限元法进行仿真。仿真结果显示,动态液面是以地球半径对应的标准液面为基准的垂直波动,振幅呈余弦形式。液面平整度在采样时间内剩余误差的均值可以控制在10^(-3)nm量级。在Φ300mm立式动态斐索干涉仪上采用0.65Cst粘度、液面厚度3mm的硅油进行实验,采样时间30s。将低粘度硅油动态干涉测量标定结果与静态绝对检验结果进行比对,二者面形分布一致,PV值偏差为λ/63,RMS值偏差为λ/400。仿真和实验结果证明了干涉仪系统误差可以用低粘度硅油干涉测量均值结果标定。The absolute test method of liquid surface usually uses a high-viscosity liquid plane as a reference for calibrating the flatness of optical flat,which has a long stabilization time and recovery time after disturbance.An absolute test method of dynamic liquid surface is proposed,which uses a dynamic interferometer to measure the dynamic surface shape of a low-viscosity silicone oil surface and uses its average value as a reference surface for calibrating the systematic error of the interferometer.Based on the principle of multi-dimensional modal analysis,a liquid plane fluctuation model is established and simulations are carried out using the finite element method.The simulation results show that the dynamic liquid surface fluctuates vertically based on the standard liquid surface corresponding to the radius of the earth,and the amplitude is in the form of a cosine function.The mean value of the residual error of the liquid surface flatness over the sampling time can be controlled to the order of 10^(-3)nm.Experiments were carried out on aΦ300mm vertical dynamic Fizeau interferometer on silicone oil of 0.65Cst viscosity and 3mm liquid thickness with a sampling time of 30s.The results of the dynamic interferometric calibration of a low-viscosity silicone oil are compared with the stable absolute test results,and the surface distribution is consistent,with a deviation ofλ/63 in PV andλ/400 in RMS.The simulation and experimental results demonstrate that the interferometer system error can be calibrated with low viscosity silicone oil interferometric mean results.

关 键 词：干涉仪误差标定 液面绝对检验 低粘度动态液面 多维模态分析 液面波动有限元仿真 

分 类 号：TH744[机械工程—光学工程]