匀光阵列微结构模具高性能非接触仿形抛光  

Investigation on High-performance Non-contact Shape Profiling Polishing for Array Diffuser Mold

作　　者：郭江 张鹏飞[1] 杨哲[1] 赵勇[1] 李琳光 景召 张蒙[1] 庞桂兵[3] GUO Jiang;ZHANG Pengfei;YANG Zhe;ZHAO Yong;LI Linguang;JING Zhao;ZHANG Meng;PANG Guibing(State Key Laboratory of High-performance Precision Manufacturing,Dalian University of Technology,Dalian 116024;Ningbo Institute of Dalian University of Technology,Ningbo 315000;School of Mechanical Engineering and Automation,Dalian Polytechnic University,Dalian 116034)

机构地区：[1]大连理工大学高性能精密制造全国重点实验室,大连116024 [2]大连理工大学宁波研究院,宁波315000 [3]大连工业大学机械工程与自动化学院,大连116034

出　　处：《机械工程学报》2024年第1期127-136,共10页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(51975096)。

摘　　要：匀光元件具有优良的光束扩散性能,被广泛应用于投影、照明及成像系统,抛光可有效去除匀光模具表面刀纹从而提升性能,但现有的抛光方法通常难以在保持微结构面形精度的同时提升表面质量。为解决上述问题,提出了一种用于阵列微结构模具的高性能非接触仿形抛光方法,研究了加工间隙和工具转速对材料去除的影响,分析了模具表面质量及面形变化。最后,通过打光测试表征了不同加工方法与元件性能的关系。结果表明,抛光对匀光元件性能提升作用显著,提出的高性能非接触仿形抛光方法可大幅提高塑件匀光性能。抛光后,模具表面粗糙度由初始的164.2 nm Ra下降至8.1 nm Ra,形状精度误差小于0.8μm,同时刀纹和毛刺被有效去除。塑件匀光亮度提升了40.4%,匀光均匀度提升了67.1%,塑件匀光性能显著提升。提出的非接触仿形抛光方法可以为高性能光学微结构元件的制造提供技术支撑。Diffusers is widely used in projection,lighting,and imaging systems because of its excellent beam diffusion performance.Polishing can effectively remove the tool marks on the mold surface,thereby improving its performance.However,the existing polishing methods often failed to improve surface quality while maintaining the shape accuracy.To solve this problem,a non-contact shape profiling polishing method using non-Newtonian fluids is proposed in this paper to achieve ultra-precision processing of array microstructured surface mold.The effects of working gap and tool speed on material removal is studied by finite element simulation and mathematical modeling.The relationship between different processing methods and component properties is indirectly characterized by optical properties test.The surface morphology,roughness,and shape accuracy of the mold before and after polishing are analyzed.The results show that polishing has a significant positive effect on the diffuser performance,and the proposed high-performance non-contact shape profiling polishing method can improve the mold precision and improve uniform performance of the diffusers.After polishing,the surface roughness of groove microstructured surface is reduced from the initial Ra 164.2 nm to 8.1 nm,less than 0.8μm shape accuracy are achieved,while the tool marks and burrs are effectively removed.After polishing,the performance of the diffuser is greatly improved,the brightness of the diffuser increased by 40.4%,and the uniformity increased by 67.1%.The proposed non-contact shape profiling polishing method provides an effective technical approach for high-performance optical microstructured surface manufacturing.

关 键 词：匀光元件 阵列微结构模具 非接触仿形抛光 刀纹去除 面形保持 

分 类 号：TG175[金属学及工艺—金属表面处理]