平板热管沟槽吸液芯结构刻蚀制造研究进展  

Research Progress in Etching Fabrication of Groove Wick Structure of Flat Heat Pipe

作　　者：伍春霞 唐恒 张仕伟[1] 孙亚隆 伍晓宇[2] 汤勇 WU Chunxia;TANG Heng;ZHANG Shiwei;SUN Yalong;WU Xiaoyu;TANG Yong(School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510640;College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518000)

机构地区：[1]华南理工大学机械与汽车工程学院,广州510640 [2]深圳大学机电与控制工程学院,深圳518000

出　　处：《机械工程学报》2023年第24期140-155,共16页Journal of Mechanical Engineering

基　　金：国家自然科学基金(52235011,51905352,52105444);深圳市优秀科技创新人才培养(RCBS20210609103819021)资助项目。

摘　　要：平板热管因传热面积大、性能高、几何形状自适应性强等优点,在高热流密度电子器件散热领域得到广泛应用。电子器件的高性能、集成化、小型化发展促使平板热管趋向于超薄化,结构稳定、质量轻、尺寸小的沟槽吸液芯结构平板热管成为解决电子芯片在有限空间内散热难题的首选方案。传统的沟槽加工工艺成本较高、沟槽加工尺寸受限,而刻蚀技术具有加工效率高、可加工结构尺寸范围广等优势,逐渐成为平板热管沟槽吸液芯结构的主要加工方法。详细介绍平板热管的类型和应用,以及不同刻蚀加工工艺的特点,重点综述目前国内外关于平板热管沟槽吸液芯结构刻蚀制造的研究进展,分析讨论沟槽吸液芯结构在刻蚀制造过程中存在的问题,并进行科学预测与展望。Flat heat pipe is widely used in the field of high heat flux electronic devices due to its advantages of large heat transfer area,high performance and strong geometric adaptability.With the development of high performance,integration and miniaturization of electronic devices,the flat heat pipe tends to be ultra-thin,and the grooved wick structure with stable structure,light weight and small size becomes the preferred solution to solve the problem of heat dissipation of flat heat pipe in limited space.The traditional groove processing technology has high cost and limited groove processing size.Etching technology has the advantages of high processing efficiency and wide range of processing structure size,which has gradually become the main processing method of flat heat pipe groove wick structure.The types and applications of flat heat pipe and the characteristics of different etching technologies are introduced in detail.The research progress on the fabrication of groove wick structure of flat heat pipe by etching technology at home and abroad are summarized.Furthermore,the shortcomings that existed on the etching process of groove wick structure are pointed out and it is also suggested that more efforts should be made to what in the future.

关 键 词：刻蚀加工 平板热管 沟槽吸液芯结构 微结构制造 

分 类 号：TK124[动力工程及工程热物理—工程热物理]