陶瓷基微带带通滤波器的设计与制备  

Design and Fabrication of Microstrip Band-pass Filter on Ceramic Substrate

作　　者：刘明辉 袁海 吴思诚 王明琼 谭晓惠 王博哲 LIU Minghui;YUAN Hai;WU Sicheng;WANG Mingqiong;TAN Xiaohui;WANG Bozhe(Xi’an Microelectronics Technology Institute,Xi’an 710000,China)

机构地区：[1]西安微电子技术研究所,西安710000

出　　处：《电子工艺技术》2024年第2期41-43,58,共4页Electronics Process Technology

摘　　要：为满足滤波器微型化、轻量化的迫切需求,设计一种中心频率为8.95 GHz,通带范围为7.85~10.10 GHz的带通滤波器。谐振单元采用微带交指结构,基板采用99.6%含量的Al_(2)O_(3)陶瓷基板。基于激光打孔、双面溅射和光刻腐蚀工艺,实现滤波器制备。测试结果表明中心频率为8.64 GHz,波形偏移0.31 GHz。In order to meet the urgent needs of miniaturization and lightweight for filters,a band-pass filter with center frequency of 8.95 GHz and passband frequency range of 7.85 GHz to 10.10 GHz is designed.The resonant unit adopts microstrip interdigital structure,and the substrate adopts 99.6% Al_(2)O_(3) ceramic substrate.Based on laser drilling,double-sided sputtering and photolithographic etching,the fabrication of filters is achieved.The test results show that the center frequency is 8.64 GHz,the waveform offset is 0.31 GHz.

关 键 词：Al_(2)O_(3)陶瓷基板 滤波器 微型化 微带交指结构 

分 类 号：TN605[电子电信—电路与系统]