高精度电子束偏转系统优化建立与仿真研究  

Optimization and Simulation of High-precision Elctron Beam Deflection System

作　　者：贾子朝 郭志伟 高学林[1] JIA Zi-zhao;GUO Zhi-wei;GAO Xue-in(Institute of Physical and Chemical Engineering of Nuclear Industry,Tianjin 300180,China;National Key Laboratory of Particle Transport and Separation Technology,Tianjin 300180,China)

机构地区：[1]核工业理化工程研究院,天津300180 [2]粒子输运与富集技术全国重点实验室,天津300180

出　　处：《真空》2024年第2期47-52,共6页Vacuum

摘　　要：电子束的高精度传输控制对于确保电子枪在金属熔炼、蒸发镀膜及电子束焊接等领域的可靠应用具有重要意义。针对电子束在金属物料蒸发环境中的传输控制技术开展研究,基于CST粒子仿真分析软件建立了30 kV电子束偏转模型,分析了偏转装置结构及位置参数变化对电子束分布的影响规律,通过仿真设计优化得到了满足需求的电子束偏转控制参数与结构。试验验证表明该结构下的电子束传输轨迹可控,建立的30 kV电子束偏转系统满足要求。High-precision transmission control of electron beams is important to ensure reliable applications of electron guns in metal melting,evaporation coating,and electron beam welding.The transmission control technology of electron beams in the evaporation environment of metal materials was studied,and a 30 kV electron beam deflection model was established based on CST particle simulation analysis software.The influence of the structure and position parameters of the deflection device on the distribution of electron beam was analyzed,and the control parameters and structure of the electron beam deflection that meet the requirements were obtained through simulation design optimization.The test results show that the electron beam transmission trajectory under the optimized structure is controllable,and the established 30 kV electron beam deflection system meets the requirements.

关 键 词：电子束传输 CST仿真 偏转装置优化 

分 类 号：TF134[冶金工程—冶金物理化学]