微型FBAR器件性能优化设计  

Performance Optimization Design of Miniature FBAR

作　　者：周晓伟 吴秀山 孙坚 徐红伟 ZHOU Xiaowei;WU Xiushan;SUN Jian;XU Hongwei(College of Mechanical and Electrical Engineering,China Jiliang University,Hangzhou 310018,China;College of Electrical Engineering,Zhejiang University of Water Resources and Electric Power,Hangzhou 310018,China)

机构地区：[1]中国计量大学机电工程学院,浙江杭州310018 [2]浙江水利水电学院电气工程学院,浙江杭州310018

出　　处：《压电与声光》2024年第1期6-10,25,共6页Piezoelectrics & Acoustooptics

基　　金：浙江省自然科学基金(LY21F040001)。

摘　　要：利用有限元仿真软件建立了薄膜体声波谐振器模型,研究了不同谐振面积(3600~10000μm^(2))条件下,电极形状(矩形、梯形、圆形和正五边形)及变迹角(30°、36°、40°和45°)对寄生谐振的影响,得到史密斯阻抗曲线和不圆度值,讨论了阶梯负载结构对横向声波泄露的抑制作用。仿真结果表明,电极形状为非正五边形,变迹角为40°时,对寄生谐振的抑制效果最好;在谐振面积为3600μm^(2)时,其不圆度为6.45%,与谐振面积为10000μm^(2)时矩形电极相当。设计的电极阶梯负载结构提升了并联谐振点处的品质因数,当电极横向尺寸为60μm时,二阶电极负载结构的品质因数为1378,比无电极负载结构的品质因数高10.07%。Using finite element simulation software,the film bulk acoustic resonator(FBAR)model was established.The study focused on investigating the effects of different electrode shapes(rectangular,trapezoidal,circular,and regular pentagonal)and apodization angles(30°,36°,40°,and 45°)on parasitic resonances under different resonant areas(3600-10000μm^(2)).The smith impedance curves and non-circularity values were obtained.The study also explored the suppression effects of stepped load structures on lateral acoustic wave leakage.The simulation results show that the non-regular pentagonal electrode shape with a apodization angle of 40°exhibits the best suppression effect on parasitic resonances.For the resonant area of 3600μm^(2),its non-circularity value is 6.45%,which is comparable to the rectangular electrode at a resonant area of 10000μm^(2).The designed stepped load structure significantly enhances the quality factor at the parallel resonance point.With a lateral dimension of 60μm,the second-order electrode load structure achieves a quality factor of 1378,which is 10.07%higher than that of the structure without electrode load.

关 键 词：薄膜体声波谐振器 有限元仿真 谐振面积 寄生谐振 品质因数 

分 类 号：TN751.2[电子电信—电路与系统]