压电谐振器等效电路参数的测量  

Measurement of Equivalent Circuit Parameters of Piezoelectric Resonators

作　　者：曹良足 殷丽霞 高慧丽 CAO Liangzu;YIN Lixia;GAO Huili(School of Mechanical and Electronic Engineering,Jingdezhen Ceramic University,Jingdezhen 333403,China)

机构地区：[1]景德镇陶瓷大学机械电子工程学院,江西景德镇333403

出　　处：《压电与声光》2024年第1期79-82,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金项目(61661023);景德镇市科技计划项目(20182GYZD011-18)。

摘　　要：压电谐振器是测量压电材料性能的基本元件。该文基于微波网络理论和压电谐振器的特性,提出了一种利用网络分析仪和电容测试仪测量压电谐振器等效电路参数的方法,并推导出等效电路参数与谐振频率、反谐振频率和插入损耗的关系式。制作了3种压电谐振器样品,用网络分析仪和电容测试仪测量了这3种样品的性能参数,计算出压电谐振器的等效电路参数。最后用微波仿真软件仿真的等效电路传输曲线与实测曲线吻合,从而验证了该方法的有效性。与传统方法相比,该方法具有快速、简单的优点。The piezoelectric resonators are the basic components for measuring the properties of piezoelectric materials.Based on the microwave network theory and characteristics of piezoelectric resonators,a method for measuring the equivalent circuit parameters of piezoelectric resonators using network analyzer and capacitance tester was proposed in this paper.The relationships between equivalent circuit parameters and resonant frequency,anti-resonant frequency and insertion loss were derived.Three kinds of piezoelectric resonator samples were made.The performance parameters of these three samples were measured by network analyzer and capacitance tester.The equivalent circuit parameters of piezoelectric resonators were calculated.Finally,the transmission curve of the measured equivalent circuit was measured by using the microwave simulation software,which was consistent with the measured curve,thus verifying the effectiveness of the method.Compared with the traditional method,the proposed method has the advantages of high-speed and simplicity.

关 键 词：压电谐振器 等效电路参数 谐振频率 反谐振频率 自由电容 

分 类 号：TM93[电气工程—电力电子与电力传动] TH873[机械工程—仪器科学与技术]