硅基MEMS梁-复合膜-岛压阻式压力传感器设计研究  

Design and Research of a Beam-Composite Membrane-Island Pressure Resistance Pressure Sensor

作　　者：江浩 黄晶 袁宇鹏 李春洋 苗晋威 李光贤 JIANG Hao;HUANG Jing;YUAN Yupeng;LI Chunyang;MIAO Jinwei;LI Guangxian(CETC Academy of Chips Technology,Chongqing 401332,China;NIICAS(Chongqing)Technology Co.,Ltd,Chongqing 401332,China;The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中电科芯片技术(集团)有限公司,重庆401332 [2]国知创芯(重庆)科技有限公司,重庆401332 [3]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2024年第1期118-123,共6页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划(2022YFB3206500)。

摘　　要：针对微机电系统(MEMS)压力传感器灵敏度与非线性度难以兼顾的问题,提出了一种梁-复合膜-岛压力传感结构,运用有限元仿真软件优化整体结构尺寸以得到最大纵横应力差、挠度,并设计压阻条压敏电阻掺杂类型、掺杂浓度、结构尺寸及分布位置。将梁-复合膜-岛结构与传统结构的输出进行仿真对比,由仿真结果可知,梁-复合膜-岛结构在0~60 kPa压力范围内灵敏度较相关结构提升7%以上,较E型结构提升2倍,非线性度为0.029%FSS,满足MEMS微压压力传感器的高灵敏度、高线性度等要求,可支撑医疗领域相关应用研究。To solve the sensitivity and nonlinearity of pressure sensor of microelectromechanical system(MEMS),Proposed a beam-composite membrane-island pressure-sensing structure,Optimize the overall structure size to obtain the maximum horizontal stress difference and deflection,Doping type,doping concentration,structure size and distribution position,And comparing the beam-composite membrane-island structure with the output of conventional structures,According to the simulation results,the sensitivity of beam-composite membrane-island structure in the range of 0-60 kPa pressure is increased by more than 7%higher than the related structure and 2 times higher than the E-type structure,The nonlinearity of 0.029%FSS,Meet the requirements of high sensitivity and high linearity of MEMS micro pressure pressure sensor,It can support the relevant applied research in the medical field.

关 键 词：压阻式压力传感器 压敏电阻 高灵敏度 微压 

分 类 号：TN384[电子电信—物理电子学]