基于原子/分子团簇结构的材料与器件制造  

Manufacturing From Atomic and Molecular Clusters to Devices

作　　者：邵金友[1,2] 宋凤麒 李祥明[1,2] 杨扬[4] 谭新峰 詹东平 金明尚 孙頔 付德君 谭元植[8] 许辉[9] Jinyou Shao;Fengqi Song;Xiangming Li;Yang Yang;Xinfeng Tan;Dongping Zhan;Mingshang Jin;Di Sun;Dejun Fu;Yuanzhi Tan;Hui Xu(State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049;Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an 710049;National Laboratory of Solid State Microstructures,College of Physics,Nanjing University,Nanjing 210093;Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361005;State Key Laboratory of Tribology in Advanced Equipment,Tsinghua University,Beijing 100o84;School of Chemistry and Chemical Engineering,State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100;Key Laboratory of Artificial Micro-and Nano-Materials of Ministry of Education,Wuhan University,Wuhan 430072;State Key Laboratory for Physical Chemistry of Solid Surfaces,Xiamen University,Xiamen 361005;Key Laboratory of Ministry of Education for Functional Inorganic Material Chemistry,Heilongjiang University,Harbin 150080)

机构地区：[1]西安交通大学精密微纳制造技术全国重点实验室,西安710049 [2]西安交通大学前沿科学技术研究院,西安710049 [3]南京大学固体微结构国家物理重点实验室,南京210093 [4]厦门大学萨本栋微米纳米科学技术研究院,厦门361005 [5]清华大学高端装备界面科学与技术全国重点实验室,北京100084 [6]山东大学化学与化工学院/晶体材料国家重点实验室,济南250100 [7]武汉大学物理科学与技术学院人工微纳米结构教育部重点实验室,武汉430072 [8]厦门大学固体表面物理化学国家重点实验室,厦门361005 [9]黑龙江大学功能无机材料化学教育部重点实验室,哈尔滨150080

出　　处：《中国科学基金》2024年第1期115-131,共17页Bulletin of National Natural Science Foundation of China

基　　金：国家自然科学基金项目(52025055,52322513)的资助。

摘　　要：原子/分子团簇是物质结构的一种新形态,具有独特的本征性质。从原子/分子团簇到器件的跨尺度制造,将为国防高端装备和新兴电子等产业发展带来深刻变革。团簇的多物质构效关系、宏量制造、团簇结构跨尺度构筑以及团簇器件的高性能制造等是原子/分子团簇器件制造的关键发展方向,主导着从原子到产品制造的发展历程。把握这些发展背后的重要机遇,将有助于占领原子级制造研究的制高点,引领原子级制造方法的变革。本文从团簇新材料的宏量制造、新型功能器件的原子/分子团簇构筑、团簇—器件的跨尺度制造工艺和装备等三个方面概括了原子/分子团簇与器件制造领域的主要研究进展,总结了原子/分子团簇与器件领域的关键科学问题及面临的挑战,并对其未来发展方向和发展战略给出了建议。Atomic/molecular clusters are a new form of material structure with unique intrinsic properties.The cross-scale manufacturing,from atomic/molecular clusters to devices,will bring profound changes to the development of industries such as high-end defense equipment and emerging electronics.The structure-activity relationship of clusters,cross-scale construction of cluster structures,and high performance manufacturing of cluster devices are the key development directions of atomic/molecular cluster device manufacturing,dominating the development process from atoms to product manufacturing.Catching the important opportunities behind these developments will be able to occupy the commanding heights of atomic-level manufacturing research and lead the transformation of atomic-level manufacturing.This paper summarizes the recent research development in the field of atom/molecular clusters and device manufacturing from three aspects:large-scale manufacturing of new cluster materials,atomic/molecular cluster construction mechanism of novel functional devices,and cross-scale manufacturing process and equipment of cluster-device,and summarizes the key scientific problems and challenges in the field of atom/molecular clusters and devices.The suggestions on its future development direction and development strategy are given.

关 键 词：原子/分子团簇 功能器件 定域组装 异质/异构界面 构效关系 宏量制造 

分 类 号：O562[理学—原子与分子物理]