制造发展的三个范式:制造发展规律的研究  

The Three Paradigms of Manufacturing Advancement:Law of Manufacturing Development

作　　者：房丰洲[1,2] 赖敏 王金石[1] 吕鹏 于楠[3] 罗熙淳 胡春光 陈远流[5] 陈磊[6] 邓辉 徐涛 康城玮 韩伟 冯俊元 Fengzhou Fang;Min Lai;Jinshi Wang;Peng Lyu;Nan Yu;Xichun Luo;Chunguang Hu;Yuanliu Chen;Lei Chen;Hui Deng;Tao Xu;Chengwei Kang;Wei Han;Junyuan Feng(School of Precision Instruments and Optoelectronic Engineering,Tianjin University,Tianjin 300072;School of Mechanical and Materials Engineering,University College Dublin,Dublin D04 ViW8,Ireland;Mechanical Engineering,University of Edinburgh,Edinburgh EH93BF,Ireland;Center for Precision Manufacturing,University of Stratford,Glasgow G11XJ,England;School of Mechanical Engineering,Zhejiang University,Hangzhou 310013;School of Mechanical Engineering,Southwest Jiaotong University,Chengdu 611756;Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen 518055;School of Integrated Circuits,Southeast University,Nanjing 210096;School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049;School of Information Science and Technology,Fudan University,Shanghai 200438;School of Mechanical Engineering,Hangzhou Dianzi University,Hangzhou 310018)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]都柏林大学机械与材料工程学院,爱尔兰,都柏林D04V1W8 [3]爱丁堡大学机械工程学院,英国,爱丁堡EH93BF [4]思克莱德大学精密制造中心,英国,格拉斯哥G11XJ [5]浙江大学机械工程学院,杭州310013 [6]西南交通大学机械工程学院,成都611756 [7]南方科技大学机械与能源工程系,深圳518055 [8]东南大学集成电路学院,南京210096 [9]西安交通大学机械工程学院,西安710049 [10]复旦大学信息科学与工程学院,上海200438 [11]杭州电子科技大学机械工程学院,杭州310018

出　　处：《中国科学基金》2024年第1期159-171,共13页Bulletin of National Natural Science Foundation of China

基　　金：国家自然科学基金项目(52035009)的资助。

摘　　要：基于对人类社会发展历史和科学技术发展内在规律的认识,本文详细分析了制造发展的三个范式,论证了原子及近原子尺度制造是制造范式III的核心使能技术。文章回顾了国内外各机构对原子级制造研发规划现状,指出我国目前处于原子级制造技术发展的重要战略机遇期,并从设计、材料、加工和检测等角度分析了原子级制造的技术体系内涵;梳理了原子级表面制造、原子级结构制造、原子级测量与表征等领域的研究进展,呈现了当前具有原子级制造能力的部分代表性技术,包括原子级切削、原子级抛光、电化学加工、等离子体原子级加工技术、原子精准操控以及原子分辨测量与表征技术,并对原子级制造战略规划提出发展建议。This article comprehensively discusses three paradigms of manufacturing advancement based on the inherent laws of scientific and technological development.It highlights that atomic-and close-to-atomic-scale manufacturing(ACSM)is the fundamental technology of Manufacturing ParadigmⅢ.Furthermore,the article introduces the current status of the development of ACSM,indicating that this technology is currently in a critical strategic opportunity period for development.Moreover,the connotation of the technical system of ACSM is analyzed from the perspectives of design,materials,processing,and measurement.The article summarizes the current research progress in the fields of atomically smooth surface manufacturing,atomic-scale feature manufacturing,and atomic-scale measurement and characterization;further,it reviews potential ACSM technologies,including atomic cutting,atomic polishing,atomic electrochemical machining,atomic plasma processing,atomic manipulation,and atomic-scale measurement and characterization.In addition,the article provides guidance for ACSM development in the future.

关 键 词：制造技术发展趋势 制造范式 原子及近原子尺度制造 原子精度制造 原子级制造 

分 类 号：TH16[机械工程—机械制造及自动化] F424[经济管理—产业经济]