光固化成型制备钛酸钡基1-3型压电复合材料  

Fabrication and Characterization of Barium Titanate Based 1-3 Piezoelectric Composites by Stereolithography Technology

作　　者：陈柳莉 陈燕 纪轩荣 CHEN Liuli;CHEN Yan;JI Xuanrong(State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,College of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学机电工程学院,省部共建精密电子制造技术与装备国家重点实验室,广州510006

出　　处：《硅酸盐学报》2024年第1期154-160,共7页Journal of The Chinese Ceramic Society

基　　金：广东省自然科学基金项目(2023A1515011620);国家自然科学基金项目(51975131,82227803)。

摘　　要：1-3型压电复合材料作为一种新型的功能材料,具有低介电常数,低声阻抗和高机电耦合系数的优点,常用于制备高灵敏度宽带超声换能器。采用光固化成型技术打印钛酸钡微柱状结构作为1-3型复合材料的压电相,通过优化浆料配方,坯体的平面尺寸精度可达到±10μm,烧结后压电微柱的宽度和高度分别为120、330μm,将环氧树脂填充于压电微柱的间隙制备1-3型压电复合材料,研究了不同压电相体积分数(20%~45%)对1-3型压电复合材料电学性能的影响。当压电相体积分数为45%时,压电复合材料的压电常数d33为74 pC/N,机电耦合系数kt为0.48,介电常数εr为1167,介电损耗tanδ为0.023,声阻抗Z为10.43 MRayl(1 Rayl=1 Pa·s/m=10-6MRayl),与钛酸钡陶瓷相比(kt约为0.37,Z为31.64 MRayl),其机电耦合系数提高了30%,声阻抗降低67%。研究结果表明,光固化成型技术制备的压电复合材料兼具高机电耦合系数和低声阻抗的优势,为压电复合材料在高性能超声换能器的应用提供了一种高效、低成本的制备方法。Introduction 1-3 type piezoelectric composites are widely used to fabricate high-sensitivity and broadband ultrasonic transducers due to the advantages like a low dielectric constant,a low acoustic impedance,and a high electromechanical coupling coefficient.However,some conventional manufacturing methods such as the cut-and-fill method,the arrangement-casting process,and the injection molding method have challenges to emanate from geometric complexity and structural integrity.Stereolithography technology based on the mask projection approach is an alternative method for manufacturing piezoelectric ceramics with a rapid prototyping and a high precision.Lead-free barium titanate BaTiO_(3)(BTO)ceramics are widely investigated for piezoelectric sensors and dielectric capacitors applications because of their high dielectric constant,good piezoelectric coefficient,and favorable electromechanical coupling coefficient.In this work,digital light processing(DLP)technology was used to manufacture barium titanate based 1-3 type piezoelectric composites.The influence of piezoelectric phase volume fraction(i.e.,20%-45%)on the micrograph,acoustic impedance and electrical properties of BTO 1-3 composites was investigated.Methods The printed ceramic slurries with 84%(in mass fraction)BTO content,including BTO powders(d_(50)=500 nm),dispersant,and liquid photopolymers,were mixed by a model ZYMC-180V homogenizer(ZYE)at 2000 r/min for 90 s.The printed models were built by a software named Computer-Aided Design(CAD)and sliced to a thickness of 7μm.The piezoelectric pillars(150μm)with a support were printed layer by layer to form the physical models(i.e.,Soon solid,TC-Ⅱ).The printed samples were washed in alcohol by aultrasonic cleaner to remove the residual slurry.Afterwards,the green bodies were treated by a two-step heating treatment,i.e.,a debonding process and a sintering process,to obtain the piezoelectric phase structures.Two-time vacuum treatments below-100 kPa were introduced to remove air bubbles in epoxy resin(EPO-TEK30

关 键 词：光固化成型 钛酸钡 1-3型 压电复合材料 

分 类 号：TB332[一般工业技术—材料科学与工程]