Simultaneously achieving high energy density and responsivity in submicron BaTiO_(3) film capacitors integrated on Si  

作　　者：Jun Ouyang Yinxiu Xue Chuanqi Song Meiling Yuan Kun Wang Yuyao Zhao Hongbo Cheng Hanfei Zhu Chao Liu 

机构地区：[1]Institute of Advanced Energy Materials and Chemistry,School of Chemistry and Chemical Engineering,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250353,China [2]Key Laboratory of Key Film Materials&Application for Equipment,School of Material Sciences and Engineering,Xiangtan University,Xiangtan 411105,China [3]School of Materials Science and Engineering,Shandong University,Jinan 250061,China [4]Academic Affairs Office,Civil Aviation University of China,Tianjin 300300,China [5]China Tobacco Shandong Industrial Co.,Ltd.,Jinan 250014,China

出　　处：《Journal of Advanced Ceramics》2024年第2期198-206,共9页先进陶瓷（英文）

基　　金：the National Natural Science Foundation of China(Grant Nos.51772175 and 52002192);Natural Science Foundation of Shandong Province(Grant Nos.ZR2022ZD39,ZR2022ME075,ZR2020QE042,ZR2022ME031,and ZR2022QB138);the Science,Education and Industry Integration Pilot Projects of Qilu University of Technology(Shandong Academy of Sciences)(Grant Nos.2022GH018 and 2022PY055);the Jinan City Science and Technology Bureau(Grant No.2021GXRC055);the Education Department of Hunan Province/Xiangtan University(Grant No.KZ0807969);funding for top talents at Qilu University of Technology(Shandong Academy of Sciences).

摘　　要：In the research field of energy storage dielectrics,the“responsivity”parameter,defined as the recyclable/recoverable energy density per unit electric field,has become critically important for a comprehensive evaluation of the energy storage capability of a dielectric.In this work,high recyclable energy density and responsivity,i.e.,W_(rec)=161.1 J·cm^(-3) and ξ=373.8 J·(kV·m^(2))^(-1),have been simultaneously achieved in a prototype perovskite dielectric,BaTiO_(3),which is integrated on Si at 500℃ in the form of a submicron thick film.This ferroelectric film features a multi-scale polar structure consisting of ferroelectric grains with different orientations and inner-grain ferroelastic domains.A LaNiO_(3) buffer layer is used to induce a{001}textured,columnar nanograin microstructure,while an elevated deposition temperature promotes lateral growth of the nanograins(in-plane diameter increases from~10-20 nm at lower temperatures to~30 nm).These preferably oriented and periodically regulated nanograins have resulted in a small remnant polarization and a delayed polarization saturation in the film’s P-E behavior,leading to a high recyclable energy density.Meanwhile,an improved polarizability/dielectric constant of the BaTiO_(3) film has produced a much larger maximum polarization than those deposited at lower temperatures at the same electric field,leading to a record-breaking responsivity for this simple perovskite.

关 键 词：energy storage energy density RESPONSIVITY BaTiO_(3) dielectric capacitor SI 

分 类 号：TQ174[化学工程—陶瓷工业]