飞秒激光直写铌酸锂晶体半包层光波导  

Femtosecond Laser Direct Writing of Lithium Niobate Crystal Semi-Cladding Optical Waveguide

作　　者：段雨濛 贾曰辰 吕金蔓 DUAN Yumeng;JIA Yuechen;LYU Jinman(Shenzhen Key Laboratory of Ultraintense Laser and Advanced Material Technology,Center for Intense Laser Application Technology,and College of Engineering Physics,Shenzhen Technology University,Shenzhen 518118,China;State Key Laboratory of Crystal Materials,School of Physics,Shandong University,Jinan 250100,China)

机构地区：[1]深圳技术大学工程物理学院,超强激光应用技术研究中心,深圳市超强激光与先进材料技术重点实验室,深圳518118 [2]山东大学物理学院,晶体材料研究院,济南250100

出　　处：《人工晶体学报》2024年第3期458-464,共7页Journal of Synthetic Crystals

基　　金：国家自然科学基金(20211062020035,12134009)。

摘　　要：本文采用飞秒激光微纳加工技术在铌酸锂(LiNbO_(3))晶体中成功制备了直径为30、40和50μm的半包层波导,并通过端面耦合技术对其导波性能进行测试,得出半包层波导在633、1550 nm波长下具有优良的传输性能,且仅支持TM偏振方向传输,具有单偏振性;通过计算波导的传输损耗,得出了30μm直径的波导在633及1550 nm波长下传输性能最佳。并且通过Rsoft软件理论计算,证明了实验结果的合理性。本研究结果为光波导设计和性能优化提供了重要的参考,具有一定的实验和理论价值。In this paper,the semi-cladding waveguides with diameters of 30,40 and 50μm were successfully prepared in lithium niobate(LiNbO_(3))crystals by femtosecond laser micro-nano-processing technology.Their waveguiding performances were tested by the end-face coupling technique,which results in the waveguides having excellent transmission performances at the wavelengths of 633 and 1550 nm.The guidance is valid only for TM polarization with the single-polarized nature.By calculating the transmission loss of the waveguide,it is concluded that the 30μm diameter waveguide has the best transmission performance at 633 and 1550 nm wavelengths.The experimental results are proved to be reasonable by theoretical calculations using Rsoft software.The results of this study provide an important reference for the design and performance optimization of optical waveguides,and have certain experimental and theoretical value.

关 键 词：飞秒激光微纳加工 光波导 铌酸锂晶体 半包层波导 1550 nm波导 单偏振态 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]