多晶硅外排硅粉提质实验研究  

Experimental Study on the Quality Improvement of Polysilicon Efflux Powder

作　　者：李日红 慕道焱 侯海波 王雅茹 LI Rihong;MU Daoyan;HOU Haibo;WANG Yaru

机构地区：[1]内蒙古通威高纯晶硅有限公司,内蒙古包头014000

出　　处：《化工设计通讯》2024年第3期14-16,共3页Chemical Engineering Design Communications

摘　　要：以冷氢化外排硅粉为原料,分别经过盐酸、氢氟酸、氢氟酸+硝酸浸洗处理,确定出外排硅粉的杂质构成—金属氯化物、二氧化硅、酸不溶物、金属杂质等。根据外排硅粉的组成成分,依次经过纯水超声处理、盐酸浸洗、氢氟酸浸洗的方法,对外排硅粉进行提质、提纯处理。经过处理后的外排硅粉在管式炉内通氯化氢气体于350℃条件下进行反应,通过反应转化率来表征硅粉的品质。实验结果表明,外排硅粉经过纯水超声后其反应转化率提高3%左右,经过进一步酸洗提纯后其反应转化率最高可提升15%左右。In this paper,the impurity composition of the silica powder was determined by washing with hydrochloric acid,hydrofluoric acid,hydrofluoric acid+nitric acid,respectively,using the cold hydrogenated silica powder as raw material.The impurity composition of the silica powder was determined as metal chloride,silicon dioxide,acid insoluble substances,metal impurities,etc.According to the composition of the silica powder,the silica powder was improved and purified by pure water ultrasonic treatment,hydrochloric acid washing and hydrofluoric acid washing.The treated silica powder was reacted with hydrogen chloride gas at 350℃in a tubular furnace,and the quality of the silica powder was characterized by the reaction conversion rate.The experimental results show that the reaction conversion rate of the silica powder is increased by about 3%after pure water ultrasonic treatment,and the maximum reaction conversion rate can be increased by about 15%after further pickling and purification.

关 键 词：外排硅粉 二氧化硅 酸不溶物 反应转化率 

分 类 号：O643[理学—物理化学]