玻璃破碎新鲜表面吸气特性及其诱导下快速抽气新方法研究  

Gas Absorption Characteristics and the New Fast Suction Method of Fresh Broken Glass Surfaces

作　　者：叶俊锋 王玉青 王旭迪[1] 梅正卫 毕海林 吴慕遥 YE Junfeng;WANG Yuqing;WANG Xudi;MEI Zhengwei;BI Hailin;WU Muyao(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;School of Automotive Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学机械工程学院,合肥230009 [2]合肥工业大学汽车与交通工程学院,合肥230009

出　　处：《真空科学与技术学报》2024年第3期204-211,共8页Chinese Journal of Vacuum Science and Technology

基　　金：安徽省自然基金面上项目(2308085MF198);国家自然基金面上项目(62271187)。

摘　　要：高真空获得及维持技术对微纳材料制备、微电子设备制造、真空电子器件工艺优化等领域的科学研究及工业应用至关重要。文章面向高真空获得及维持过程中吸气材料吸气机理解析及寻优材料替代之关键科学问题,致力于克服传统高真空技术维持高真空状态能耗高、传统高真空获得方法依赖于昂贵设备和复杂操作等缺陷,提出了一种基于玻璃破碎新鲜表面诱发高真空获得及压力下限突破的新方法;文章首先开展了吸气成分及分压力测试实验及最大有效抽速实验研究。实验结果表明新鲜玻璃破碎表面具备吸气效应;解析玻璃新鲜表面吸附的主要气体成分及分压力变化,剖析出主要吸附气体组分为氢气和氮气;定量评估了新方法的抽气能力,利用蒙特卡洛方法仿真分析了泵出口管道的传输概率,获得新方法的最大有 效抽速。相比现有真空获得和维持技术,文章所提出的新方法具有易激活、材料性价比高、抽速可观等优势,有助于为狭小 空间高真空获得及维持提供新型技术途径及应用有效性参考。High vacuum acquisition and maintenance technology is crucial for scientific research and industrial applications in the fields of micro nano material preparation,microelectronic equipment manufacturing,and vacuum electronic device process optimization.Key scientific issues about the suction mechanism of getter materials and the optimizing material substitution during the acquisition and maintenance of high vacuum are emphasized in this work.It is committed to overcoming shortcomings of traditional high vacuum technology,such as high energy consumption in maintaining high vacuum state,and the dependence of traditional high vacuum acquisition methods on expensive equipment and complex operations.A new method based on the induction of high vacuum acquisition and pressure lower limit breakthrough by fresh glass crushing surface is proposed.This work first conducts experiments on the composition and partial pressure of the suction,as well as experiments on breaking through the lower limits of molecular pump pressure and ion pump pressure under open states.Fresh glass shattered surfaces are found to have suction effects.The main gas components and partial pressure changes adsorbed on the fresh glass surface are analyzed.The main adsorbed gas components are found to be H2 and N2.The pumping capacity of the new method is quantitatively evaluated.The pipeline transmission probability of the pump outlet and the maximum effective pumping speed are analyzed by performing Monte-Carlo simulations.Compared with existing vacuum acquisition and maintenance technologies,the high vacuum acquisition method proposed in this work has advantages such as easy activation,high material cost performance,and observable pumping speed,which can help to provide new theoretical and technical approaches and effective application references for acquiring and maintaining high vacuum in narrow spaces.

关 键 词：高真空获得 新鲜表面诱发 快速抽气 最大有效抽速 

分 类 号：TB7[一般工业技术—真空技术]