硬质合金表面预处理状态对TiAlCrSiN/TiAlN涂层结构与机械性能的影响  

Effect of Surface Pretreatment States of Cemented Carbide on the Structure and Mechanical Properties of TiAlCrSiN/TiAlN Coating

作　　者：余晶 敬正彪 鲜广[2] 冉龙姣 YU Jing;JING Zhengbiao;XIAN Guang;RAN Longjiao(Institute of Intelligent Manufacturing and Automobile,Chengdu Vocational&Technical College of Industry,Chengdu 610218,China;School of Mechanical Engineering,Sichuan University,Chengdu 610065,China;School of Mechanical Engineering,Chengdu University,Chengdu 610106,China)

机构地区：[1]成都工业职业技术学院智能制造与汽车学院,成都610218 [2]四川大学机械工程学院,成都610065 [3]成都大学机械工程学院,成都610106

出　　处：《真空科学与技术学报》2024年第3期272-278,共7页Chinese Journal of Vacuum Science and Technology

基　　金：四川省自然科学基金项目(2023NSFSC0416);成都工业职业技术学院校级科研项目(2022YJ-40)。

摘　　要：采用电弧离子镀工艺在不同预处理后的硬质合金表面制备TiAlCrSiN/TiAlN涂层,采用扫描电镜、X射线衍射仪、纳米压痕仪、压痕法等研究硬质合金表面形态和涂层结构、力学性能和结合强度。结果表明:抛光处理后的硬质合金表面十分平整,表面粗糙度低至7.7 nm。酸洗处理使硬质合金表层Co相溶解而暴露出更多的硬质相,表面粗糙度增大,TiAlCrSiN/TiAlN涂层在酸洗处理的硬质合金上生长速率增大,晶粒细小,硬度和弹性模量高,但硬模比较低。喷砂处理使Co相塑性变形而包络更多的硬质相,表面粗糙度大幅增加,TiAlCrSiN/TiAlN涂层在喷砂处理的硬质合金上生长速率稍降低,晶粒粗大,硬度和弹性模量小,但硬模比较高。酸洗+喷砂复合处理的硬质合金表面TiAlCrSiN/TiAlN涂层的硬度、弹性模量、硬模比介于两种单独处理方式的之间。TiAlCrSiN/TiAlN coatings were prepared on different pretreated cemented carbides using arc ion plating technology.The surface state of cemented carbide substrates and coating structure,mechanical properties and bonding strength of the as-deposited coating were studied using scanning electron microscopy,X-ray diffraction,nano-indentation and indentation methods.The results show that the surface of the polished cemented carbide was very flat,with a surface roughness as low as 7.7 nm.Pickling treatment dissolved the Co phase in the surface of the cemented carbide and exposed more hard phases,resulting in an increase in surface roughness.The growth rate of TiAlCrSiN/TiAlN coating on the pickled cemented carbide increased,with small grains,high hardness and elastic modulus,but low hard modulus.Sandblasting treatment caused plastic deformation of the Co phase and enveloped more hard phases,resulting in a significant increase in surface roughness.The growth rate of TiAlCrSiN/TiAlN coating on the sandblasted cemented carbide was slightly reduced,with coarse grains,low hardness and elastic modulus,but high hard modulus.The hardness,elastic modulus,and the ratio of hardness to elastic modulus of TiAlCrSiN/TiAlN coating deposited on cemented carbide with duplex pretreatment of pickling and sandblasting were between those of coatings by the two separate treatment methods.

关 键 词：基体预处理 电弧离子镀 TiAlCrSiN/TiAlN 涂层 表面粗糙度 界面 

分 类 号：TG174.4[金属学及工艺—金属表面处理]