激光回馈精密测量技术及应用  

Laser feedback precision measurement and applications

作　　者：谈宜东[1] 彭程[1] TAN Yidong;PENG Cheng(State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学精密仪器系精密测试技术及仪器国家重点实验室,北京100084

出　　处：《计测技术》2024年第1期30-42,共13页Metrology & Measurement Technology

基　　金：国家重点研发计划项目(2020YFC2200204、2020YFC2200101)。

摘　　要：介绍了激光回馈干涉的理论模型,阐述了激光回馈测量灵敏度高、装置结构简单、可自准直、能够对非合作目标进行精密测量的技术特点。分析了激光回馈测量相较传统干涉测量的优势,探讨了激光回馈测量技术在工业和科研领域中的应用方向,包括位移、角度、振动、绝对距离测量等,指出利用频率复用、偏振复用、(准)共路等技术可提高回馈测量的实际应用性能。最后展望了激光回馈技术的发展前景,为推动回馈技术的广泛应用提供借鉴。Introduced the theoretical model of laser feedback interferometry,explaining the technical characteristics such as high sensitivity,simple device structure,self⁃aligning,and the ability to achieve precise measurements of non⁃cooperative targets.The advantages of laser feedback measurement and traditional interferometric measurement methods were discussed.Explored various applications of laser feedback measurement in industrial and research domains,including displacement measurement,angle measurement,vibration measurement,and absolute distance measurement.It is pointed out that the use of structures like harmonic reuse,frequency reuse,polarization reuse,and full⁃path coherent combining can enhance the application performance of feedback measurement.Finally,the future development direction of laser feedback technology is discussed,providing reference for promoting the widespread application of feedback technology.

关 键 词：精密测量 激光回馈 自混合干涉 高灵敏度 

分 类 号：TB96[机械工程—光学工程]