基于栅格节距中心峰值检测的扫描探针显微镜校准方法  

SPM calibration method based on peak detection of lattice pitch centers

作　　者：石俊凯 陈晓梅 万宇[2] 霍树春 姜行健 李冠楠 周维虎 SHI Junkai;CHEN Xiaomei;WAN Yu;HUO Shuchun;JIANG Xingjian;LI Guannan;ZHOU Weihu(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100094,China;Changcheng Institute of Metrology&Measurement,Beijing 100095,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]航空工业北京长城计量测试技术研究所,北京100095

出　　处：《计测技术》2024年第1期73-79,共7页Metrology & Measurement Technology

基　　金：国家重点研发计划项目(2022YFB3207104)。

摘　　要：为了解决扫描探针显微镜(Scanning Probe Microscope,SPM)现有校准方法复杂程度高且存在局限性的问题,提出了一种基于二维标准微尺度正交栅格的SPM校准方法,通过对扫描获取的栅格图像进行互相关/卷积(Cross-correlation/Convolution,CC)滤波,实现对栅距中心坐标的峰值检测。校准的运动几何误差包括x轴和y轴位置偏差Δ_(x)和Δ_(y)、沿x轴和y轴扫描的直线度偏差δy和δx以及两轴之间的正交性偏差γ_(xy)。根据x轴和y轴扫描像素数、扫描范围、标准栅格计量检定节距平均值、栅距平均值计算得出校准因子C_(x)和C_(y)。采用标称节距为10μm的正交栅格样板对原子力显微镜(Atomic Force Microscope,AFM)进行校准实验,结果显示C_(x)和C_(y)分别为0.925和1.050,γ_(xy)为0.015°,该台AFM的校准扩展不确定度为0.33μm(k=2.56)。研究成果对于推动SPM校准标准文件的具体实施和执行具有积极意义,并为SPM仪器研制及性能评估提供了技术参考。To address the complexity and limitations of existing calibration methods for Scanning Probe Microscope(SPM),this article proposed a novel SPM calibration method by using a 2D micro-scale orthogonal lattice standard and peak detection(PD)method of the pitch center coordinates based on cross-correlation/convolution(CC)filtering of raster-scanned images.The geometric errors of motion include positional deviationsΔ_(x) andΔ_(y),straightness deviationsδy andδx along x-axis and y-axis respectively,and the orthogonality deviationγxy between the two axes.The calibration factors C_(x) and C_(y) were calculated based on the number of pixels scanned on the x-axis and y-axis,scanning range,average pitch of standard grid metrology verification,and average grid spacing.Through case study,an AFM was calibrated using an or-thogonal lattice standard with a nominal pitch of 10μm,resulting in C_(x) and C_(y) values of 0.925 and 1.050,respectively,and an orthogonal deviation γ_(xy) of 0.015°.The expanded uncertainty of calibration for this AFM was 0.33μm(k=2.56).This SPM calibration method will promote the implementation and execution of SPM calibration standard documents,and has technical reference value for the development and performance evaluation of SPM instruments.

关 键 词：扫描探针显微镜 原子力显微镜 运动几何误差 校准和测量 栅格节距中心 

分 类 号：TB92[一般工业技术—计量学] TH742[机械工程—测试计量技术及仪器]