超薄膜真空电容镀膜工艺性能研究与提升  

Research and Improvement of Superthin Film Vacuum Capacitance Coating Technology Performance

作　　者：李明峻 李翔 何东 徐文博 胡忠胜 耿万青 LI Mingjun;LI Xiang;HE Dong;XU Wenbo;HU Zhongsheng;GENG Wanqing(Anhui CEPREI Industrial Technology Research Institute Co.,Ltd.,Hefei 230011,China;Wuhu CEPREI Information Industry Technology Research Institute Co.,Ltd.,Wuhu 241000,China;Anhui Feida Electrical Technology Co.,Ltd.,Xuancheng 242300,China;Anhui Jiabao Vacuum Technology Co.,Ltd.,Xuancheng 242300,China)

机构地区：[1]安徽赛宝工业技术研究院有限公司,安徽合肥230011 [2]芜湖赛宝信息产业技术研究院有限公司,安徽芜湖241002 [3]安徽飞达电气科技有限公司,安徽宣城242300 [4]安徽伽宝真空科技有限公司,安徽宣城242300

出　　处：《电子产品可靠性与环境试验》2024年第1期72-76,共5页Electronic Product Reliability and Environmental Testing

基　　金：2021年度安徽省“揭榜挂帅”专项(薄膜电容器小型化关键技术)资助。

摘　　要：为了满足现有的薄膜电容器体积小、性能稳定和适用高压电路等要求,针对国内真空镀膜机设备存在的操作复杂、工艺参数多、镀膜厚度大和击穿电压低等问题,对超薄膜真空电容镀膜工艺性能进行了研究和设计。经过测试表明,新装置拥有允许小规格薄膜作低方阻高速度镀膜并且保证最大程度维持原膜电性能等优点;同时,其还拥有可超薄膜到0.8μm、镀铝速度可达9~15 m/s、镀层厚达0.6Ω/m^(2)、没有热损伤和机械损伤、成倍地提高击穿电压等特点,保证了产品的最佳质量性能,进一步降低了薄膜厚度和电容器体积,大大地提高了产品的质量和经济效益。In order to meet the requirements of small volume,stable performance and suitable for high voltage circuit,the process performance of ultra-thin film vacuum capacitor coating is studied and designed in view of the problems of complex operation,many process parameters,large coating thickness and low breakdown voltage of domestic vacuum coating machines.The test results show that the new device has the advantages of allowing size films to be coated with low square resistance and high speed and maintaining the electrical properties of the original films to the greatest extent.At the same time,it also has the characteristics of ultra-film thickness of 0.8μm,aluminum plating speed of up to 9~15 m/s,coating thickness of up to 0.6Ω/m^(2),no thermal damage and mechanical damage,and doubling the breakdown voltage.It ensures the best quality performance of the product,further reduces the thickness of the film and the volume of the capacitor,and greatly improves the product quality and economic benefits.

关 键 词：薄膜电容器 镀膜 工艺 

分 类 号：TM537.1[电气工程—电器]