高回弹性压阻式薄膜压力传感器的研究进展  

Research progress of high resilience piezoresistive thin-film pressure sensors

作　　者：张燕军[1] 孙晨 高吉成[1] 缪宏[1] 张善文[1] 杨坚 ZHANG Yanjun;SUN Chen;GAO Jicheng;MIAO Hong;ZHANG Shanwen;YANG Jian(College of Mechanical Engineering,Yangzhou University,Yangzhou 225127,China)

机构地区：[1]扬州大学机械工程学院,江苏扬州225127

出　　处：《传感器与微系统》2024年第4期1-6,共6页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(32072785)。

摘　　要：压阻式薄膜压力传感器作为薄膜压力传感器的重要分支,具有灵敏度高、响应快、弹性好等优点,如何同时实现高灵敏度、宽工作范围、快速响应和快速回弹是未来所面临的挑战,而新型材料、结构设计、传感器制备方式及动态特性建模是高回弹性传感器研制的关键。本文归纳了基底及活性层材料制备及其相应单一微结构、仿生结构、皱褶结构的设计,同时阐述了高回弹性压阻式薄膜的制备技术,总结了薄膜压力传感器动态建模和动态补偿的方法,最后对薄膜压力传感器发展中的新需求做了展望。As an important branch of thin film pressure sensor,piezoresistive thin film pressure sensor has the advantages of high sensitivity,fast response and good elasticity,it is the challenge to achieve high sensitivity,wide working range,fast response and fast rebound at the same time in the future,and new materials,structural design,sensor preparation methods and dynamic characteristics modeling are the key for high resilience sensors.The design of substrate and active layer materials and their corresponding single microstructures,bionic structures and wrinkle structures is summarized,and the preparation technology of thin films is elaborated,the dynamic modeling and dynamic compensation method of thin film pressure sensor are summarized.Finally,new demand for development of thin film pressure sensor is prospected.

关 键 词：薄膜压力传感器 制备材料 制备工艺 动态特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] Q212[自动化与计算机技术—控制科学与工程]