用于纳米压电定位平台的电容传感器设计  

Design of capacitive sensor for nano piezoelectric positioning platform

作　　者：付连壮 刘曰涛[1] 韩振 蔡如岩 李自帅 FU Lianzhuang;LIU Yuetao;HAN Zhen;CAI Ruyan;LI Zishuai(School of Mechanical Engineering,Shandong University of Technology,Zibo 255049,China)

机构地区：[1]山东理工大学机械工程学院,山东淄博255049

出　　处：《传感器与微系统》2024年第4期100-103,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51805299)。

摘　　要：针对纳米压电定位平台中电阻应变片式传感器无法满足定位精度的问题,设计了一种非接触式测量的双极板电容式位移传感器。首先,详细分析了电容传感器的基本测量原理和闭环控制原理。对电容传感器固有的边缘效应问题进行理论分析,并通过保护环措施消除其影响。在建立电磁仿真参数模型的基础上,带保护环结构的电容仿真值与理想值误差小于1.8%。改进了一种基于有源电桥的高灵敏度运算放大器式电容检测电路,使电路具有更高的分辨率和线性度。通过对该传感器进行标定,其测量范围在0~30μm内,线性度为0.05%,分辨力优于0.01μm。Aiming at the problem that resistance strain gauge type sensor on nano piezoelectric positioning platform,cannot meet the positioning precision,a bipolar plate capacitive displacement sensor for non-contact measurement is designed.Firstly,basic measurement principle and closed-loop control principle of capacitive sensor are analyzed in detail,and the inherent edge effect of capacitive sensor is analyzed theoretically and measures of protection ring are taken to eliminate its effect.On the basis of establishing electromagnetic simulation parameter model,the error between the simulation value of the capacitor with the guard ring structure and the ideal value is less than 1.8%.A high-sensitivity operational amplifier-type capacitance detection circuit based on active bridge is improved,so that the circuit has higher resolution and linearity.The sensor is calibrated,the measurement range is 0~30μm,the linearity is 0.05%,and the resolution is prior to 0.01μm.

关 键 词：电容传感器 压电平台 闭环控制 保护环 电磁仿真 电容检测电路 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]