基于冲击法的压电式力传感器灵敏度研究  

Study on Sensitivity of Piezoelectric Force Sensors Based on Impact Method

作　　者：王振 范海艇[1] 施娟[1] 王军 李政[1] WANG Zhen;FAN Haiting;SHI Juan;WANG Jun;LI Zheng(Shanghai Institute of Quality Inspection and Technical Research,Shanghai 201114,China)

机构地区：[1]上海市质量监督检验技术研究院,上海201114

出　　处：《测试技术学报》2024年第2期120-128,共9页Journal of Test and Measurement Technology

基　　金：上海市质量监督检验技术研究院青年科技启明星资助项目(QMX-2022-10-JL)。

摘　　要：为了开展冲击力校准装置下压电式力传感器动态灵敏度的校准,介绍了基于自由落体的落锤冲击力模型和基于空气轴承悬浮支撑的水平式质量块冲击碰撞的模型;通过4阶Butterworth低通滤波,研究加速度信号波形的滤波平滑,比较了不同截止频率的滤波效果;通过激光测振仪和标准加速度计测量加速度的对比试验,研究加速度绝对测量法与比较测量法对力传感器动态灵敏度校准精度的影响。试验结果表明,激光测振仪测量加速度须通过微分解调,要选择合适上限截止频率的4阶Butterworth低通滤波器进行滤波平滑处理;激光干涉绝对法复现的动态力精度为2%,加速度计比较法复现的动态力精度为4%;激光干涉绝对法校准的灵敏度波动性比加速度计比较法校准的灵敏度波动性小。In order to calibrate the dynamic sensitivity of piezoelectric force sensors under the impact force calibration device,the drop hammer impact force model based on free-falling bodies and the horizontal mass block impact collision model based on air-bearing suspension support was first introduced.Then,through 4th order Butterworth low-pass filtering,the filtering smoothness of acceleration signal waveform was studied,and the filtering effects of different cut-off frequencies were compared.Finally,a comparative experiment was conducted on the measurement of acceleration using a laser vibrometer and a standard accelerometer to investigate the impact of the absolute acceleration measurement method and comparative measurement method on the accuracy of dynamic sensitivity calibration of force sensors.The experimental results indicate that the acceleration measurement of the laser vibration meter must be achieved through differential demodulation,and a 4-order Butterworth low-pass filter with an appropriate upper cut-off frequency should be selected for filtering and smoothing processing;The dynamic force accuracy reproduced by the absolute laser interference method is 2%,and the dynamic force accuracy reproduced by the accelerometer comparison method is 4%;The sensitivity fluctuation of laser interference absolute method calibration is smaller than that of accelerometer comparison method calibration.

关 键 词：灵敏度 力传感器 校准 动态特性 巴特沃斯滤波器 

分 类 号：TB936[一般工业技术—计量学]