一种压阻式传感器信号调理电路的设计  

Design of a piezoresistive sensor signal conditioning circuit

作　　者：李艳[1] 石云波[1] 赵锐[1] 张志峰 LI Yan;SHI Yunbo;ZHAO Rui;ZHANG Zhifeng(State Key Laboratory of Testing Technology,North University of China,Shanxi Taiyuan 030051,China;Shanxi North Machinery Manufacturing,Shanxi Taiyuan 030051,China)

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]山西北方机械制造有限责任公司,山西太原030051

出　　处：《工业仪表与自动化装置》2024年第2期10-14,共5页Industrial Instrumentation & Automation

基　　金：山西省基础研究计划面上项目(202103021224206)。

摘　　要：由于压阻式MEMS传感器输出信号极其微弱,极易受到测试环境的噪声干扰,还需要外接调理电路,为了提升信号的采集精度,提出一种压阻式传感器信号ASIC调理电路的设计方案,实现输出信号的放大、滤波功能。测试结果表明,调理电路可以在10~200倍的范围内调节增益,-0.5 dB截止频率调节范围覆盖0.1~20 kHz;低频范围内,芯片的等效噪声为45 nV/√Hz。将调理电路与传感器相结合,改进的测试系统响应速度快,滤波效果更好,测试精度优于5%,传感器非线性为5.4%。同时,调理电路的大小和体积也很小,功耗低,对后续继续研究传感器测试系统有重要意义。As the output signal of piezoresistive MEMS sensor is extremely weak,it is easy to be disturbed by the noise of the test environment,and an external conditioning circuit is needed.In order to improve the signal acquisition accuracy,a design scheme of the piezoresistive sensor signal ASIC conditioning circuit is proposed to realize the amplification and filtering functions of the output signal.The test results show that the control circuit can adjust the gain in the range of 10~200 times,and the adjustment range of-0.5 dB cutoff frequency covers 0.1~20 kHz.In the low frequency range,the equivalent noise of the chip is 45 nV/√Hz.By combining the conditioning circuit with the sensor,the improved test system has fast response speed,better filtering effect,test accuracy is better than 5%,and the sensor nonlinearity is 5.4%.At the same time,the size and volume of the conditioning circuit are also small,and the power consumption is low,which is of great significance for the follow-up research on the sensor test system.

关 键 词：压阻式 信号调理 放大 滤波 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN43[自动化与计算机技术—控制科学与工程]