KDP晶体潮解抛光表面质量的模拟分析  

Simulation Analysis of the Surface Quality in Deliquescent Polishing of KDP Crystals

作　　者：郭少龙 刘佳航 李阳 徐泽林 晏祖根[1] GUO Shaolong;LIU Jiahang;LI Yang;XU Zelin;YAN Zugen(School of Light Industry,Harbin University of Commerce,Harbin 150028,China;Jiamusi Electric Machine Co.,Ltd.,Harbin Electric Corporation,Jiamusi Heilongjiang 154002,China)

机构地区：[1]哈尔滨商业大学轻工学院,黑龙江哈尔滨150028 [2]哈尔滨电气集团佳木斯电机股份有限公司,黑龙江佳木斯154002

出　　处：《佳木斯大学学报（自然科学版）》2024年第2期76-79,共4页Journal of Jiamusi University：Natural Science Edition

摘　　要：通过运动学分析,得到了KDP晶体表面上一点相对于抛光垫的运动方程。分别绘制了载样盘转数、载样盘圆心与抛光垫圆心之间的水平距离、载样盘圆心与其摆动圆心之间的水平距离、摆动周期取不同值时KDP晶体表面上一点相对于抛光垫的运动轨迹仿真图形,得到了这些参数对KDP晶体抛光表面质量的影响规律,并据此确定了这些参数的优化方向。Through kinematic analysis,the motion equation of a point on the surface of KDP crystal relative to the polishing pad was obtained.The simulation graphics of the number of rotations of the sample disk,the horizontal distance between the center of the sample disk and the center of the polishing pad,the horizontal distance between the center of the sample disk and its swinging center,and the motion trajectories of a point on the surface of KDP crystal relative to the polishing pad at different values of the swinging period were drawn.The influence of these parameters on the surface quality of KDP crystal was obtained,and the optimization direction of these parameters was determined based on this.

关 键 词：KDP晶体 抛光 潮解 表面质量 

分 类 号：TH161[机械工程—机械制造及自动化]