基于直线轨迹的激光跟踪仪测量精度测试方法  

Accuracy Test Method of Laser Tracker Measurement Based on Linear Trajectory

作　　者：张甜 缪东晶[2] 李连福[2] 杨玲[1] 王国磊[3] 傅奕劼 赫明钊[2] 李建双[2] 刘洋[2] ZHANG Tian;MIAO Dongjing;LI Lianfu;YANG Ling;WANG Guolei;FU Yijie;HE Mingzhao;LI Jianshuang;LIU Yang(Harbin University of Science and Technology,Harbin 150080,China;National Institute of Metrology,Beijing 100029,China;Tsinghua University,Beijing 100084,China;Beijing Ruijie Precision Control Automation Technology Co.,Ltd.,Beijing 102208,China)

机构地区：[1]哈尔滨理工大学,哈尔滨150080 [2]中国计量科学研究院,北京100029 [3]清华大学,北京100084 [4]北京瑞杰精控自动化技术有限公司,北京102208

出　　处：《航空制造技术》2024年第3期75-82,114,共9页Aeronautical Manufacturing Technology

基　　金：国家重点研发计划(2021YFF0600205);工信部民机科研专项(MJ-2018-G-54);中国计量科学研究院基本科研业务费(AKYZZ2103).

摘　　要：激光跟踪仪测量技术广泛应用于装配、制造等多个领域。为研究激光跟踪仪测量精度,研制了一套以光栅尺采集值为参考,通过多轴运动控制器实现电机运动控制、光栅尺采集、激光跟踪仪测量三者同步触发的坐标测量精度测试系统。对系统重复定位精度与激光跟踪仪同步触发坐标测量精度分别进行了试验。结果表明,系统重复定位误差在[–4.0μm,4.0μm]之间。3台不同型号激光跟踪仪在切向方向上与目标反射镜的距离为[2.7 m,3.4 m]时,其坐标测量误差随速度变化分布在[–23μm,988μm]之间。激光跟踪仪在径向方向上与目标反射镜的距离为[1.5 m,3.8 m]时,其坐标测量误差随速度变化分布在[5μm,915μm]之间。Laser tracker measurement technology is widely used in assembling,manufacturing and other fields.For the study of the laser tracker measurement accuracy,a set of coordinate measurement accuracy testing system is developed,which can realize synchronous trigger of motor motion control,grating scale acquisition and laser tracker measurement through multi-axis motion controller based on the data collected by grating scale.The repeated positioning accuracy of the system and the synchronous trigger coordinate measurement accuracy of the laser tracker are tested respectively.The results show that the system repeated positioning error is between[–4.0μm,4.0μm].When the distance between three laser trackers and the target mirror in the tangential direction is[2.7 m,3.4 m],the coordinate measurement error varies with the velocity between[–23μm,988μm].When the distance between laser tracker and the target mirror in the radial direction is[1.5 m,3.8 m],the coordinate measurement error varies with velocity between[5μm,915μm].

关 键 词：计量学 激光跟踪仪 光栅尺 同步触发 精度测试 

分 类 号：TN249[电子电信—物理电子学]