Impedancemetry of multiplexed quantum devices using an on-chip cryogenic complementary metal-oxide-semiconductor active inductor  

作　　者：L.Le Guevel G.Billiot S.De Franceschi A.Morel X.Jehl A.G.M.Jansen G.Pillonnet 

机构地区：[1]UniversitéGrenoble Alpes,CEA,LETI,Grenoble F-38000,France [2]UniversitéGrenoble Alpes,CEA,Grenoble INP,IRIG,PHELIQS,Grenoble F-38000,France [3]Department of Electrical and Computer Engineering,University ofMassachusetts-Amherst,MA 01003,USA [4]UniversitéSavoie Mont Blanc,SYMME,Annecy F-74000,France

出　　处：《Chip》2023年第4期133-141,共9页芯片（英文）

基　　金：supported by the EuropeanUnion’s Horizon 2020 Research and Innovation program under GrantAgreement No.810504(ERC Synergy project QuCube).

摘　　要：In the pursuit for scalable quantum processors,significanteffort has been devoted to the development of cryogenic classical hardware for the control and readout of a growingnumber of qubits.The current work presented a novelapproach called impedancemetry that is suitable for measuringthe quantum capacitance of semiconductor qubits connected toa resonant LC-circuit.The impedancemetry circuit exploits theintegration of a complementary metal-oxide-semiconductor(CMOS)active inductor in the resonator with tunable resonance frequency and quality factor,enabling the optimizationof readout sensitivity for quantum devices.The realized cryogenic circuit allows fast impedance detection with a measuredcapacitance resolution down to 10 aF and an input-referrednoise of 3.7 aF/Hz p.At 4.2 K,the power consumption of theactive inductor amounts to 120μW,with an additional dissipation for on-chip current excitation(0.15μW)and voltageamplification(2.9 mW)of the impedance measurement.Compared to the commonly used schemes based on dispersiveRF reflectometry which require millimeter-scale passive inductors,the circuit exhibits a notably reduced footprint(50μm360μm),facilitating its integration in a scalable quantumclassical architecture.The impedancemetry method has been applied at 4.2 K to the detection of quantum effects in the gatecapacitance of on-chip nanometric CMOS transistors that areindividually addressed via multiplexing.

关 键 词：Impedancemetry Qubit readout Cryogenic circuit Activeinductor CMOS 

分 类 号：TN4[电子电信—微电子学与固体电子学]