新一代线角度基准装置的研制  

The Development of New Primary Standard for Positional Angles

作　　者：黄垚 薛梓[1] 吴金杰[1] 车双良[2] HUANG Yao;XUE Zi;WU Jinjie;CHE Shuangliang(National Institute of Metrology,Beijing 100029,China;College of Optical Science and Engineering,Zhejiang University,Hangzhou 310058,China)

机构地区：[1]中国计量科学研究院,北京100029 [2]浙江大学光电科学与工程学院,杭州310058

出　　处：《计量科学与技术》2024年第2期3-9,共7页Metrology Science and Technology

基　　金：国家自然科学基金(51935004)。

摘　　要：面向数控机床回转定位、航空航天器飞行姿态调控及测绘仪器空间定向领域,针对相关装备角度测量圆分度核心器件的量值传递需求,参照国家平面角计量器具检定系统要求,中国计量科学研究院研制并建立了新一代线角度基准装置。该装置通过超精密精密回转角定位、自校准扫描干涉式圆光栅测量、全圆连续补偿等一系列关键技术,实现了整分角度、细分角度一体化测量,及静态测量、扫描测量多种测量功能,测量范围达到b,采样步长优于0.01″,测量不确定度达到U=0.03″(k=2),为圆分度角度测量仪器提供了全圆连续的量值溯源平台。The National Institute of Metrology of China has developed a new primary standard for positional angles,catering to the needs of angle measurement in machine tool rotation positioning,aviation and aerospace attitude control,and spatial orientation in surveying instruments.This standard,aligned with the national verification scheme for plane angle measuring instruments,incorporates advanced technologies such as ultra-precise rotational positioning,self-calibrating scanning interferometry,and continuous full-circle compensation.It enables integrated measurement of both whole and subdivided angles,offering diverse functionalities like static and scanning measurements.This standard spans a measurement range of 0°to 360°,with a sampling step finer than 0.01″,and achieves a measurement uncertainty of U=0.03″(k=2).It provides a continuous full-circle traceability platform for angle measuring instruments.

关 键 词：计量学 角度 基准装置 系统表 

分 类 号：TB922[一般工业技术—计量学]