双轴倾角传感器温度补偿方法  

Temperature compensation method of biaxial inclination sensor

作　　者：林新华 周子栋[1,2] 邵淑芳 林威[2] 张瑞 LIN Xin-hua;ZHOU Zi-dong;SHAO Shu-fang;LIN Wei;ZHANG Rui(Institutes of Physical Science and Information Technology,Anhui University,Hefei 230601,China;Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]安徽大学物质科学与信息技术研究院,合肥230601 [2]中国科学院合肥物质科学研究院,合肥230031

出　　处：《吉林大学学报（工学版）》2024年第2期558-563,共6页Journal of Jilin University:Engineering and Technology Edition

基　　金：中国科学院战略性先导科技专项项目(XDA22030305);国家自然科学基金项目(U1732152)。

摘　　要：针对倾角传感器中三轴微机电系统(MEMS)加速度计的敏感轴与倾角传感器体坐标系不一致而产生的难以直接获取其温度特性进行温度补偿的问题,提出了一种基于转换矩阵对角元素归一化的温度补偿方法。采用传统的“六位置法”获取用于补偿灵敏度系数不一致和非正交导致误差的转换矩阵以及包含偏置误差的矩阵。相对于常温获取的转换矩阵,对不同温度下的转换矩阵相应对角元素归一化,以获取灵敏度系数温度特性,克服灵敏度系数不一致相关的矩阵与非正交相关的矩阵无法分离的问题,从而实现三轴加速度计灵敏度系数和偏置的温度补偿。在温度为-20℃~50℃条件下的试验结果表明,该方法可有效减小倾角传感器的温度漂移。The inclination sensors based on MEMS accelerometers has been widely used.However,it is well known that a large temperature drift exists in MEMS accelerometers.In this paper,the temperature compensation method based on the normalization of diagonal elements of the transformation matrix was proposed.Both the transformation matrix accounting for the sensitivity,non-orthogonality and misalignment and the other matrix accounting for the bias were obtained with the conventional six-position method.The problem that the matrix related to the sensitivity inconsistence can't be separated from the matrix related to the non-orthogonality was overcome through the normalization of the diagonal elements of transformation matrices obtained under the different temperatures relative to the corresponding elements in the transformation matrices obtained under the room temperature.As a result,the temperature drift of the sensitivity and bias of MEMS accelerometers was compensated.Under the testing temperature of−20℃~50℃,the precision of the inclination sensor was obviously improved after compensation.

关 键 词：倾角传感器 三轴加速度计 温度补偿模型 转换矩阵对角元素归一化 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]