可伐合金预氧化工艺对金属-玻璃封接气密性的影响研究  

Research on the Effect of Kovar Alloy Pre-oxidation Process on the Airtightness of Metal Glass Sealing

作　　者：张玉 刘旭 刘林杰[1] Zhang Yu;Liu Xu;Liu Linjie(The 13rd Institute of China Electronics Technology Group Corporation,Shijiazhuang Hebei 050000,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050000

出　　处：《山西冶金》2024年第2期45-47,共3页Shanxi Metallurgy

摘　　要：可伐合金和硅硼玻璃是通过可伐合金表面的氧化物与玻璃互溶而紧密结合在一起的,因此可伐合金的预氧化工艺是金属-玻璃封接的关键工序,是直接影响金属-玻璃封接气密性的重要因素。基于空气预氧化方法分析预氧化温度、时间、曲线等工艺因素对可伐合金在空气中预氧化及封接外壳气密性的影响。结果表明,可伐合金在空气中的氧化层厚度随温度和时间单调增加,在500~550℃空气气氛中氧化15~20 min,可伐合金表面形成0.7~1.6μm厚的氧化层,金属-玻璃封接外壳可获得较高的气密可靠性。Kovar alloy and silicon boron glass are tightly combined through the mutual dissolution of oxides on the surface of Kovar alloy with glass.Therefore,the pre oxidation process of Kovar alloy is a key process in metal glass sealing and an important factor that directly affects the airtightness of metal glass sealing.Based on the air pre oxidation method,this paper analyzes the influence of process factors such as pre oxidation temperature,time,and curve on the pre oxidation and sealing shell airtightness of Kovar alloy in air.The results show that the thickness of the oxide layer of Kovar alloy in air increases monotonically with temperature and time.When oxidized in an air atmosphere at 500~550℃for 15~20 minutes,the surface of Kovar alloy forms 0.7~1.6μm.The thick oxide layer and metal glass sealing shell can achieve high airtightness reliability.

关 键 词：可伐合金 预氧化 金属玻璃封接 气密性 

分 类 号：TG136[一般工业技术—材料科学与工程]