Fully sprayed MXene-based high-performance flexible piezoresistive sensor for image recognition  

作　　者：Zhi-Dong Zhang Xue-Feng Zhao Qing-Chao Zhang Jie Liang Hui-Nan Zhang Tian-Sheng Zhang Chen-Yang Xue 

机构地区：[1]Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan,030051,People's Republic of China [2]State Key Laboratory of ASIC and System,Shanghai Institute of Intelligent Electronics&Systems,School of Microelectronics,Fudan University,Shanghai,200433,People's Republic of China [3]Shanxi Hosipital of Acupuncture and Moxibustion,Taiyuan,030006,People's Republic of China

出　　处：《Nano Materials Science》2024年第1期77-85,共9页纳米材料科学（英文版）

基　　金：supported by the Key Research and Development Program of Shanxi Province(No.202102130501011);the Fund for Shanxi“1331 Project”Key Subject Construction(1331KSC);National Key Research and Development Program of China(Grant No.2019YFB2004800).

摘　　要：High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pressure sensors require extensive nano-architectural design and complicated manufacturing and are timeconsuming.Herein,a highly sensitive,flexible piezoresistive tactile sensor is designed and fabricated,consisting of three main parts:the randomly distributed microstructure on T-ZnOw/PDMS film as a top substrate,multilayer Ti_(3)C_(2)-MXene film as an intermediate conductive filler,and the few-layer Ti_(3)C_(2)-MXene nanosheetbased interdigital electrodes as the bottom substrate.The MXene-based piezoresistive sensor with randomly distributed microstructure exhibits a high sensitivity over a broad pressure range(less than 10 kPa for 175 kPa^(-1))and possesses an out-standing permanence of up to 5000 cycles.Moreover,a 16-pixel sensor array is designed,and its potential applications in visualizing pressure distribution and an example of tactile feedback are demonstrated.This fully sprayed MXene-based pressure sensor,with high sensitivity and excellent durability,can be widely used in,electronic skin,intelligent robots,and many other emerging technologies.

关 键 词：Piezoresistive sensor Ti_(3)C_(2)-MXene T-ZnOw/PDMS film Randomly distributed microstructure 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] TP212[自动化与计算机技术—计算机科学与技术] TB306[一般工业技术—材料科学与工程]