倾斜入射下超透镜亚波长聚焦特性研究  

Sub-wavelength focusing characteristics study of the metalens under oblique incidence

作　　者：邹依洋 武志翔 刘泉澄 李新羽 熊亮 邓琥 尚丽平 ZOU Yiyang;WU Zhixiang;LIU Quancheng;LI Xinyu;XIONG Liang;DENG Hu;SHANG Liping(Institute of Detection Technology and Application,School of Information Engineering,Southwest University of Science and Technology,Mianyang 621010,China;Institute of Detection Technology and Application,School of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China;Joint Lab Extreme Condition Matter Properties,School of Information Engineering,Southwest University of Science and Technology,Mianyang 621010,China)

机构地区：[1]西南科技大学信息工程学院检测技术及应用研究所,四川绵阳621010 [2]西南科技大学制造科学与工程学院检测技术及应用研究所,四川绵阳621010 [3]西南科技大学信息工程学院极端条件物性联合实验室,四川绵阳621010

出　　处：《光学技术》2024年第2期235-240,共6页Optical Technique

基　　金：国家自然科学基金(批准号:62105271);四川省科技厅支撑计划(批准号:2020YJ0160);西安近代化工研究所开放基金(批准号:SYJJ20210411);西南科技大学博士基金项目(批准号:19zx7160)。

摘　　要：亚波长聚焦透镜被广泛应用于光学显微、成像和光刻等光学领域,具有亚波长结构的聚焦光场在倾斜入射下存在着严重影响光学成像质量的轴外像差。文章展示了一种高数值孔径(0.970)的光学超透镜设计方法,利用具有宽角度响应超原子的光场调控功能,结合孔径对倾斜入射光场的矫正,可同时满足倾斜入射时亚波长紧聚焦和宽带操作。数值仿真结果表明,在带有5μm孔径的超透镜中,可在倾斜入射角±30°范围内实现亚波长紧聚焦,峰值半高全宽范围为0.600~0.885λ;在550~750nm的入射波长范围内实现亚波长聚焦,并且其操作带宽达到200nm。Sub-wavelength focusing lenses are widely used in optical applications such as optical microscopy,imaging,and lithography.The focused optical field with sub-wavelength structure has additional axial aberrations that severely affect the quality of optical imaging at oblique incidence.A high numerical aperture(0.970)optical metalens design method is presented,which can simultaneously meet the sub-wavelength tight focusing and broadband operation at oblique incidence.Optical field control functions with wide-angle response meta-atoms are used,combined with corrections to the oblique incident optical field by aperture stop.The numerical simulation results show that the metalens with 5μm aperture stop,sub-wavelength tight focusing can be achieved within the incidence angle±30°,and the peak full-width-at-halfmaximum range is 0.600~0.885λ.Sub-wavelength focusing is achieved in the incident wavelength range of 550~750nm with an operational bandwidth of 200nm.

关 键 词：超表面 亚波长聚焦 光学 高数值孔径 倾斜入射 

分 类 号：O436[机械工程—光学工程]